Abstract
The roadmap for AlGaN based DUV LEDs is similar to that for InGaN based visible LEDs, such that the success of achieving high crystalline-quality epilayers is the precondition for fabricating high-brightness DUV LEDs. This chapter will review the most adopted technologies for growing high-quality Al-rich AlGaN films, which is regarded as the milestone for making high-efficiency DUV LEDs.
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Zhang, ZH., Chu, C., Tian, K., Zhang, Y. (2019). Increase the IQE by Improving the Crystalline Quality for DUV LEDs. In: Deep Ultraviolet LEDs. SpringerBriefs in Applied Sciences and Technology(). Springer, Singapore. https://doi.org/10.1007/978-981-13-6179-1_2
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DOI: https://doi.org/10.1007/978-981-13-6179-1_2
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