Abstract
Textured surfaces with sophisticated micro/nanostructures can provide advanced and useful functions. To promote widespread use of these textured surfaces with mass production, manufacturing technology of structured surfaces for ultra-precision dies and molds made of hardened steel and tungsten carbide becomes essential. Nowadays, elliptical vibration cutting (EVC) is attracting more and more attention due to its excellent machining performances in precision machining of difficult-to-cut materials. The emphasis on this chapter is the practical applications of EVC in micro/nanomanufacture process. The development of the EVC technology is introduced firstly, and then, the advantageousness of EVC in the micro/nanomachining process is explored in detail. Moreover, a unique amplitude control sculpturing method, where the depth of cut is arbitrary changed by controlling the vibration amplitude, is introduced. As following, a criterion to indicate how to obtain ductile machining of tungsten carbide is clarified by applying EVC. The feasibility of highly accurate micro/nanomachining of tungsten carbide and hardened steel is experimentally verified with a machining accuracy of about ±1 nm in the depth-of-cut direction. A series of functional surfaces with textured grooves, dimple patterns, and sinusoidal grids were successfully fabricated on tungsten carbide, hardened steel, and single-crystal silicon, which could be applied to the molding, encoder, optoelectronics, and semiconductor industries. The EVC technology is expected to promote the development of micro/nanomachining process in the actual industrial applications.
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References
Shieh HPD, Huang YP, Chien KW (2004) Micro-optics components for liquid crystal displays applications. In: Proceedings of the 24th international display research conference, Daegu, Korea, pp 56–58
Schumann M, Bückmann T, Gruhler N, Wegener M, Pernice W (2014) Hybrid 2D-3D optical devices for integrated optics by direct laser writing. Light: Sci Appl 3:e175. https://doi.org/10.1038/lsa.2014.56
Xie WT, Dai YJ, Wang RZ, Sumathy K (2011) Concentrated solar energy applications using Fresnel lenses: a review. Renew Sustain Energy Rev 15:2588–2606
Yang J, Luo FF, Kao TS, Li X, Ho GW, Teng JH, Luo XG, Hong MH (2014) Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nano processing. Sci Appl 3:e185. https://doi.org/10.1038/lsa.2014.66
Miyoshi H, Adachi T, Ju J, Lee SM, Cho DJ, Ko JS, Uchida G, Yamagata Y (2012) Characteristics of motility-based filtering of adherent cells on microgrooved surfaces. Biomaterials 33:395–401
Lewis PR, McCutchen CW (1959) Experimental evidence for weeping lubrication in mammalian joints. Nature 184:1285
Bico J, Marzolin C, Quéré D (1999) Pearl drops. Europhys Lett 47:220–226
Callies M, Chen Y, Marty F, Pepin A, Quere D (2005) Microfabricated textured surfaces for super-hydrophobicity investigations. Microelectron Eng 78–79:100–105
Gao W, Kimura A (2007) A three-axis displacement sensor with nanometric resolution. CIRP Ann Manuf Technol 56:529–532
Kawasegi N, Sugimori H, Morimoto H, Morita N, Hori I (2009) Development of cutting tools with microscale and nanoscale textures to improve frictional behavior. Precis Eng 33:248–254
Evans CJ, Bryan JB (1999) “Structured”, “textured” or “engineered” surfaces. CIRP Ann Manuf Technol 48:541–556
Bruzzone AAG, Coata HL, Lonardo PM (2008) Advances in engineered surfaces for functional performance. CIRP Ann Manuf Technol 57:750–769
Yan JW, Oowada T, Zhou TF, Kuriyagawa T (2009) Precision machining of microstructures on electroless-plated NiP surface for molding glass components. J Mater Process Technol 209:4802–4808
Paul E, Evans CJ, Mangamelli A, McGlauflin ML, Polvani RS (1996) Chemical aspects of tool wear in single point diamond turning. Precis Eng 18:4–19
Bulla B, Klocke F, Dambon O (2012) Analysis on ductile mode processing of binderless, nano crystalline tungsten carbide through ultra precision diamond turning. J Mater Process Technol 212:1022–1029
Brehl DE, Dow TA (2008) Review of vibration-assisted machining. Precis Eng 32:153–172
Shamoto E, Moriwaki T (1994) Study on elliptical vibration cutting. CIRP Ann Manuf Technol 43:35–38
Suzuki N, Yokoi H, Shamoto E (2011) Micro/nano sculpturing of hardened steel by controlling vibration amplitude in elliptical vibration cutting. Precis Eng 35:44–50
Shamoto E, Morimoto Y, Moriwaki T (1999) Elliptical vibration cutting (2nd report, study on effects of vibration conditions). J Jpn Soc Precis Eng 65:411–417 (In Japanese)
Shamoto E, Suzuki N, Hino R (2008) Analysis of 3D elliptical vibration cutting with thin shear plane model. CIRP Ann Manuf Technol 57:57–60
Shamoto E, Moriwaki T (1999) Ultaprecision diamond cutting of hardened steel by applying elliptical vibration cutting. CIRP Ann Manuf Technol 48:441–444
Suzuki N, Nakamura A, Shamoto E, Harada K, Matsuo M, Osada M (2003) Ultraprecision micromachining of hardened steel by applying ultrasonic elliptical vibration cutting. In: Proceedings of international symposium on micromechatronics and human science, Nagoya, Japan, pp 221–226
Brinksmeier E, Gläbe R (2001) Advances in precision machining of steel. CIRP Ann Manuf Technol 50:385–388
Zhang XQ, Kumar AS, Rahman M, Nath C, Liu K (2011) Experimental study on ultrasonic elliptical vibration cutting of hardened steel using PCD tools. J Mater Process Technol 211:1701–1709
Suzuki N, Haritani M, Yang J, Hino R, Shamoto E (2007) Elliptical vibration cutting of tungsten alloy molds for optical glass parts. CIRP Ann Manuf Technol 56:127–130
Suzuki N, Hino R, Masuda S, Shamoto E (2006) Ultraprecision cutting of sintered tungsten carbide by applying elliptical vibration cutting-study on ductile cutting mechanics. J Jpn Soc Precis Eng 72:539–545 (In Japanese)
Suzuki N, Masuda S, Shamoto E (2004) Ultraprecision machining of sintered tungsten carbide by applying ultrasonic elliptical vibration cutting. In: Proceedings of 4th European international conference, Glasgow, Scotland, pp 187–188
Nath C, Rahman M, Neo KS (2009) A study on ultrasonic elliptical vibration cutting of tungsten carbide. J Mater Process Technol 209:4459–4464
Zhang JG, Suzuki N, Wang YL, Shamoto E (2014) Fundamental investigation of ultra-precision ductile machining of tungsten carbide by applying elliptical vibration cutting with single crystal diamond. J Mater Process Technol 214:2644–2659
Zhang JG, Suzuki N, Shamoto E (2011) Micro machining of binderless tungsten carbide by applying elliptical vibration cutting technology. In: Proceedings of the Japan Society for Abrasive Technology Conference (ABTEC), Kasugai, Japan, pp 109–114
Xu WX, Zhang LC, Wu YB (2014) Elliptic vibration-assisted cutting of fibre-reinforced polymer composites: understanding the material removal mechanisms. Compos Sci Technol 92:103–111
Moriwaki T, Suzuki H, Mizugaki J, Maeyasu Y, Higashi Y, Shamoto E (2004) Ultraprecision cutting of Molybdenum by ultrasonic elliptical vibration cutting. In: Proceedings of the 19th annual meeting of the ASPE, Orlando, USA, vol 19, pp 621–624
Song YC, Park CH, Moriwaki T (2010) Mirror finishing of Co–Cr–Mo alloy using elliptical vibration cutting. Precis Eng 34:784–789
Ammouri AH, Hamade RF (2012) BUEVA: a bi-directional ultrasonic elliptical vibration actuator for micromachining. Int J Adv Manuf Technol 58:991–1001
Kim GD, Loh BG (2007) Characteristics of chip formation in micro V-grooving using elliptical vibration cutting. J Micromech Microeng 17:1458–1466
Zhang JG (2014) Micro/nano machining of steel and tungsten carbide utilizing elliptical vibration cutting technology, PhD dissertation, September, Nagoya University, Department of Mechanical Engineering
Zhang JG, Cui T, Ge C, Sui YX, Yang HJ (2016) Review of micro/nano machining by utilizing elliptical vibration cutting. Int J Mach Tools Manuf 106:109–126
Ahn JH, Lim HS, Son SM (1999) Improvement of micromachining accuracy by 2-dimensional vibration cutting. In: Proceedings of the 14th annual meeting of the ASPE, Monterey, USA, vol 20, pp150–153
Kim GD, Loh BG (2008) Characteristics of elliptical vibration cutting in micro-V grooving with variations in the elliptical cutting locus and excitation frequency. J Micromech Microeng 18:025002
Kim GD, Loh BG (2011) Direct machining of micro patterns on nickel alloy and mold steel by vibration assisted cutting. Int J Precis Eng Manuf 12:583–588
Kim GD, Loh BG (2010) Machining of micro-channels and pyramid patterns using elliptical vibration cutting. Int J Adv Manuf Technol 49:961–968
Brehl DE, Dow TA, Garrard K, Sohn A (2006) Microstructure fabrication using elliptical vibration-assisted machining. In: Proceedings of the 21th annual meeting of the ASPE, Monterey, USA, vol 39, pp 511–514
Brehl DE, Dow TA, Sohn A (2015) Micro-machining using EVAM, Precision Engineering Consortium in North Carolina State University, USA: https://www.pec.ncsu.edu/wp-content/uploads/sites/10/2015/03/1842.pdf (Cited in 2015)
Brehl DE, Dow TA (2006) Review of vibration-assisted machining methods for precision fabrication, North Carolina State University Raleigh. http://aspe.pointinspace.com/publications/Annual_2006/POSTERS/5PROCESS/2MACH/2013.PDF
Brehl DE, Dow TA (2007) 3-D microstructure creation using elliptical vibration-assisted machining. In: Proceedings of the 22th annual meeting of the ASPE, Dallas Texas, USA, pp 21–26
Brocato B, Dow TA, Sohn A (2004) Micro-machining using elliptical vibration assisted machining. In: Proceedings of the 19th annual meeting of the ASPE, Orlando, USA, vol 34, pp 80–83
Kim GD, Loh BG (2007) An ultrasonic elliptical vibration cutting device for micro V-groove machining: kinematical analysis and micro V-groove machining characteristics. J Mater Process Technol 190:181–188
Moriwaki T, Shamoto E (1995) Ultrasonic elliptical vibration cutting. CIRP Ann Manuf Technol 44:31–34
Shamoto E, Suzuki N, Naoi Y, Moriwaki T (2002) Development of ultrasonic elliptical vibration controller for elliptical vibration cutting. CIRP Ann Manuf Technol 51:327–330
Shamoto E, Suzuki N (2009) Development of elliptical vibration cutting technology and its application to ultraprecision/micro machining of hard/brittle materials. Adv Mater Res 69–70:133–137
Shamoto E, Suzuki N (2008) Elliptical vibration cutting of hard mold materials. In: Optical fabrication and testing, Optical Society of America, p OTuB1
Zhou M, Hu LH (2015) Development of an innovative device for ultrasonic elliptical vibration cutting. Ultrasonics 60:76–81
Li X, Zhang DY (2006) Ultrasonic elliptical vibration transducer driven by single actuator and its application in precision cutting. J Mater Process Technol 180:91–95
Brinksmeier E, Gläbe R (1999) Elliptical vibration cutting of steel with diamond tools. In: Proceedings of the 14th annual meeting of the ASPE, Monterey, USA, vol 31, pp 05.11
Guo P, Ehmann KF (2013) Development of a tertiary motion generator for elliptical vibration texturing. Precis Eng 37:364–371
Guo P, Ehmann KF (2013) An analysis of the surface generation mechanics of the elliptical vibration texturing process. Int J Mach Tools Manuf 64:85–95
Shamoto E, Suzuki N, Tsuchiya E, Hori Y, Inagaki H, Yoshino K (2005) Development of 3 DOF ultrasonic vibration tool for elliptical vibration cutting of sculptured surfaces. CIRP Ann Manuf Technol 54:321–324
Shamoto E, Suzuki N, Hino R, Tsuchiya E, Hori Y, Inagaki H, Yoshino K (2005) A new method to machine sculptured surfaces by applying ultrasonic elliptical vibration cutting. In: IEEE International Symposium on micro-nanomechatronics and human science. IEEE, Nagoya, Japan, pp 91–96
Suzuki N, Hino R, Shamoto E (2007) Development of 3 DOF ultrasonic elliptical vibration system for elliptical vibration cutting. In: Proceedings of ASPE spring topical meeting on vibration assisted machining technology, North Carolina, USA, pp 15–20
Yin L, Spowage AC, Ramesh K, Huang H, Pickering JP, Vancoille EYJ (2004) Influence of microstructure on ultraprecision grinding of cemented carbides. Int J Mach Tools Manuf 44:533–543
Yin L, Vancoille EY, Ramesh K, Huang H, Pickering JP, Spowage AC (2004) Ultraprecision grinding of tungsten carbide for spherical mirrors. Proc Inst Mech Eng, Part B: J Eng Manuf 218:419–429
Yamamoto Y, Suzuki H, Moriwaki T, Okino T, Hijikata Y, Roblee J, Miyashita T (2006) Development of cross and parallel mode grinding machine for high NA aspherical mold and die. In: Proceedings of the 21th annual meeting of the ASPE, Monterey, USA, vol 39, pp 499–502
Suzuki H, Moriwaki T, Okino T, Ando Y (2006) Development of ultrasonic vibration assisted polishing machine for micro aspheric die and mold. CIRP Ann Manuf Technol 55:385–388
Suzuki H, Hamada S, Okino T, Kondo M, Yamagata Y, Higuchi T (2010) Ultraprecision finishing of micro-aspheric surface by ultrasonic two-axis vibration assisted polishing. CIRP Ann Manuf Technol 59:347–350
Zhang JG, Zhang JJ, Cui T, Hao ZW, Zahrani A (2017) Sculpturing of single crystal silicon microstructures by elliptical vibration cutting. J Manuf Process 29:389–398
Casstevens JM (1983) Diamond turning of steel in carbon saturated atmospheres. Precis Eng 5:9–15
Evans C (1991) Cryogenic diamond turning of stainless steel. CIRP Ann Manuf Technol 40:571–575
Brinksmeier E, Gläbe R, Osmer J (2006) Ultra-precision diamond cutting of steel molds. CIRP Ann Manuf Technol 55:551–554
Song Y, Nezu K, Park C, Moriwaki T (2009) Tool wear control in single-crystal diamond cutting of steel by using the ultra-intermittent cutting method. Int J Mach Tools Manuf 49:339–343
Zhang JG, Suzuki N, Shamoto E (2013) Investigation on machining performance of amplitude control sculpturing method in elliptical vibration cutting. Procedia CIRP 8:328–333
Zhang JG, Suzuki N, Wang YL, Shamoto E (2015) Ultra-precision nano-structure fabrication by amplitude control sculpturing method in elliptical vibration cutting. Precis Eng 39:86–99
Chavoshi SZ, Goel S, Luo XC (2016) Influence of temperature on the anisotropic cutting behaviour of single crystal silicon: a molecular dynamics simulation investigation. J Manuf Process 23:201–210
Goel S, Luo XC, Agrawal A, Reuben RL (2015) Diamond machining of silicon: a review of advances in molecular dynamics simulation. Int J Mach Tools Manuf 88:131–164
Mohammadi H, Ravindra D, Kode SK, Patten JA (2015) Experimental work on micro laser-assisted diamond turning of silicon (111). J Manuf Process 19:125–128
Ayomoh M, Abou-El-Hossein K (2015) Surface finish in ultra-precision diamond turning of single-crystal silicon. In: Proceedings of SPIE/APOMA, vol 9633, p 96331
Chen YL, Cai YD, Shimizu Y, Ito S, Gao W, Ju BF (2016) Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool. J Micromech Microeng 26:025002
De CL, Kunzmann H, Peggs GN, Lucca DA (2003) Surfaces in precision engineering, microengineering and nanotechnology. CIRP Ann Manuf Technol 52:561–577
SoRef R (2010) Mid-infrared photonics in silicon and germanium. Nat Photonics 4:495–497
Mukaida M, Yan JW (2017) Ductile machining of single crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo. Int J Mach Tools Manuf 115:2–14
Komanduri R, Chandrasekaran N, Raft LM (1998) Effect of tool geometry in nanometric cutting: a molecular dynamics simulation approach. Wear 219:84–97
Yan JW, Yoshino M, Kuriagwa T, Shirakashi T, Syoji K, Komanduri R (2001) On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical application. Mater Sci Eng A 297:230–234
Moriwaki T, Shamoto E, Inoue K (1992) Ultraprecision ductile cutting of glass by applying ultrasonic vibration. CIRP Ann Manuf Technol 41:141–144
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Zhang, J., Suzuki, N., Shamoto, E. (2019). Advanced Applications of Elliptical Vibration Cutting in Micro/Nanomachining of Difficult-to-Cut Materials. In: Zhang, J., Guo, B., Zhang, J. (eds) Simulation and Experiments of Material-Oriented Ultra-Precision Machining. Springer Tracts in Mechanical Engineering. Springer, Singapore. https://doi.org/10.1007/978-981-13-3335-4_7
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