Micro Electrometers Based on Micromachined Time-Modulated Variable Capacitors

Abstract

This chapter describes the concept of a micro electrometer based on a time-modulated variable capacitor. The roots of the device concept trace back to a period prior to the availability of microfabrication technology and techniques. This chapter shows how microfabrication technology, when aptly applied to older concepts that were previously realized using conventional machining techniques, can provide significant advancements in performance. This is particularly the case where the parasitic elements at the interface between parts of the system have an impact on the sensor performance. Through tighter integration of constituent parts, significant improvements in performance can be realized through further miniaturization.