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Desirable Features for High-Temperature SiC Sensors

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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

Part of the book series: SpringerBriefs in Applied Sciences and Technology ((BRIEFSAPPLSCIENCES))

Abstract

There are several parameters representing the detection capability and efficiency of SiC sensors towards practical applications such as temperature detectors, flow sensors, convective-based accelerometers and gyroscopes. This chapter presents a number of desirable parameters for SiC thermal sensors at high temperatures. These important features include, but are not limited to, the sensitivity, response time and linearity.

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Author information

Authors and Affiliations

  1. Queensland Micro- and Nanotechnology Centre (QMNC), Griffth University, Brisbane, QLD, Australia

    Toan Dinh

  2. Queensland Micro- and Nanotechnology Centre (QMNC), Griffith University, Brisbane, QLD, Australia

    Nam-Trung Nguyen

  3. School of Engineering and Built Environment, Griffith University, Southport, QLD, Australia

    Dzung Viet Dao

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  1. Toan Dinh
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  2. Nam-Trung Nguyen
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  3. Dzung Viet Dao
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Correspondence to Toan Dinh .

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Dinh, T., Nguyen, NT., Dao, D.V. (2018). Desirable Features for High-Temperature SiC Sensors. In: Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors. SpringerBriefs in Applied Sciences and Technology. Springer, Singapore. https://doi.org/10.1007/978-981-13-2571-7_3

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