Abstract
A Dielectric on Metal (DOM) capacitor in RF MEMS capacitive parallel switches which are generally used for microwave and radar applications in media transmission field, encounter the evil impacts of genuine drawbacks. By the surface repulsiveness of the dielectric layer, there will diminish in the downstate capacitance, in this manner a basic move is found in the deafening repeat. This impediment can be proficient by changing DOM change to a MIM switch that is putting away a thin layer of skimming metal on the dielectric layer. In MIM switch the major factor achieved that is the flexibility in working repeat. The equipotential thought of the coasting metal is suitably utilized and a framework is proposed in this paper. Without a change in the assistant model, the deafening repeat can be varied by changing the length of the skimming metal in case of this MIM change when stood out from a DOM switch. By this blueprint, we can finish the switch working at different frequencies on a comparative wafer. The uneasiness bars are used as a piece of the arrangement remembering the ultimate objective to sidestep the fastening factor. As demonstrated by the arrangement in the paper the switch is worked, duplicated, made and depicted in the K-band extent of a repeat. The most stress is found in this layout. The sketched out switch portrays a diminishment in the full repeat with respect to increase in the floating metal by researching the arrangement versatility in this paper.
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Acknowledgements
Authors would like to thank NPMASS for providing necessary FEM tool. The Authors would like to thank SERB (Science and Engineering Research Board), Govt. of India, New Delhi, for providing partial financial support to carry out this research work under ECRA Scheme (File No: SERB/ECR/2016/000757).
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Susmitha, A. et al. (2019). Design and Simulation of a MIM Capacitor Type RF MEMS Switch for Surface Radar Application. In: Panda, G., Satapathy, S., Biswal, B., Bansal, R. (eds) Microelectronics, Electromagnetics and Telecommunications. Lecture Notes in Electrical Engineering, vol 521. Springer, Singapore. https://doi.org/10.1007/978-981-13-1906-8_46
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DOI: https://doi.org/10.1007/978-981-13-1906-8_46
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