Abstract
The secondary electron is researched in many fields. In order to measure the secondary electron angular distribution of all the solid angle, the X axis support and Y axis support are proposed. The energy distribution of the secondary electron also can be measured. The accumulated charge on the insulated material surface during the secondary electron measurement has very bad effects. Although many methods have been used for the charge neutralization, many defects are still not resolved. So the plasma neutralization is proposed. The plasma neutralization can also be used in the electron microscopy.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
Wiza, J.L.: Microchannel plate detectors. Nucl. Instrum. Methods A 162, 587–601 (1979)
Giudicotti, L.: Time dependent model of gain saturation in microchannel plates and channel electron multipliers. Nucl. Instrum. Methods A 659, 336–347 (2001)
Wang, Y.F., Qiang, S., Zhao, T.C., et al.: A new design of large area MCP-PMT for the next generation neutrino experiment. Nucl. Instrum. Methods A 695, 113–117 (2012)
Ahn, S., Lee, S.E., Ryu, S.H., et al.: A study on the secondary electron emission from Na-ion-doped MgO films in relation to the discharge characteristics of plasma display panels. Thin Solid Films 517, 1706–1709 (2009)
Altieri, S., Finazzi, M., Hsieh, H.H., et al.: Secondary electron yield enhancement by MgO capping layers. Surf. Sci. 604, 181–185 (2010)
Auday, G., Guill, Ph., Galy, J.: Secondary emission of dielectrics used in plasma display panels. J. Appl. Phys. 88, 4871 (2000)
Vaughan, J.R.M.: Observations of multipactor in magnetrons. IEEE Trans. Electron Dev. 15(11), 883–889 (1968)
Benford, J., Benford, G.: Pulse shortening in high power microwave sources. In: IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science, Boston, MA, USA (1996)
Michizono, S., Saito, Y., Yamaguchi, S., Anami, S.: Dielectric materials for use as output window in high-power klystrons. IEEE Trans. Electr. Insul. 28(4), 692–699 (1993)
Kim, H.C., Verboncoeu, J.P.: Transition of window breakdown from vacuum multipactor discharge to RF plasma. Phys. Plasma 13(5), 123–131 (2006)
Rimmer, R.A.: High power microwave window failures. IEEE Trans. Plasma Sci. 5(12), 121–130 (1998)
Hatch, A.J., Williams, H.B.: Multipacting modes of high-frequency gaseous breakdown. Phys. Rev. 112, 681 (1958)
Vaughan, J.R.M.: Multipactor. IEEE Trans. Electron. Dev. 35, 1172 (1988)
Gonin, I., Khabibouline, T., Langranco, G., et al.: High gradient tests of the HINS SSRa1 single spoke resonator. In: HB 2008 (2008)
Anderson, B.: Mechanism of pulsed surface flashover involving electron-stimulated desorption. J. Appl. Phys. 51(3), 1414–1421 (1980)
Boersch, H., Hamisch, H., Ehrlich, W.: Surface discharges across insulators in vacuum. Z. Angew. Phys. 15(6), 518–525 (1963)
Saito, Y., Michizuno, N., Anami, S., et al.: Surface flashover on alumina RF windows for high-power use. IEEE Trans. Electr. Insul. 28(4), 566–573 (1993)
Guo, Z.Y., Liu, Y.D., Qin, Q., et al.: The studies of electron cloud instability. In: Proceedings of APAC 2004, Gyeongju, Korea, pp. 44–48 (2004)
Yamamoto, K., Shibata, T., Ogivara, N., et al.: Secondary electron emission yields from the J-PARC RCS vacuum components. Vacuum 81, 788–792 (2007)
Zimmermann, F.: The electron cloud instability: summary of measurements and understanding. In: Proceedings of the 2001 Particle Accelerator Conference, Chicago, pp. 666–670 (2001)
Harkay, K., Rosenberg, R., Guo, Z.Y., et al.: Survey of recent results on electron cloud effects in photon machines. In: Proceedings of the 2001 Particle Accelerator Conference, Chicago, pp. 671–675 (2001)
HarKay, K.: Electron cloud observations: a retrospective. In: Proceedings of the 31st ICFA Advanced Beam Dynamics Workshop on Electron-Cloud Effects, ECLOUD 2004, California (2004)
Jbara, O., Fakhfakh, S., Belhaj, M., Rondot, S., Hadjadj, A., Patat, J.M.: Charging effects of PET under electron beam irradiation in a SEM. J. Phys. D Appl. Phys. 41, 245504 (2008)
Boughariou, A., Hachicha, O., Kallel, A., Blaise, G.: Effect of current density on electron beam induced charging in MgO. Nuclear Instrum. Methods Phys. Res. B 240, 697–703 (2005)
Cazaux, J.: Mechanisms of charging in electron spectroscopy. J. Electron Spectrosc. Relat. Phenom. 105, 155–185 (1999)
Willis, R.F.: Secondary-electron-emission spectroscopy of tungsten angular dependence and phenomenology. Phys. Rev. B 18(10), 5140–5161 (1978)
Hopman, H.J., Alberda, H., Attema, I., Zeijlemaker, H., Verhoeven, J.: Measuring the secondary electron emission characteristic of insulators. J. Electron Spectrosc. Relat. Phenom. 131–132, 51–60 (2003)
Kawai, J.: Total reflection X-ray photoelectron spectroscopy: a review. J. Electron Spectrosc. Relat. Phenom. 178–179, 268–272 (2010)
Chen, L., Tian, J., Liu, C., Wang, Y., Zhao, T., Liu, H., Wei, Y., Sai, X., Chen, P., Wang, X., Lu, Y., Hui, D., Guo, L., Liu, S., Qian, S., Xia, J., Yan, B., Zhu, N., Sun, J., Si, S., Li, D., Wang, X., Huang, G., Qi, M.: Optimization of the electron collection efficiency of a large area MCP-PMT for the JUNO experiment. Nucl. Instrum. Methods Phys. Res. Sect. A 827, 124–130 (2016)
Jinhai, L.: Patent: one type of device for second electron measurement, 201610988714.7
Bohm, C., Perrin, J.: Retarding-field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low-pressure radio frequency discharge. Rev. Sci. Instrum. 64(1), 31–44 (1993)
Palmberg, P.W., Rhodin, T.N.: Auger electron spectroscopy of FCC metal surface. J. Appl. Phys. 39(5), 2425–2432 (1968)
Patino, M.I., Raitses, Y., Koel, B.E., Wirz, R.E.: Analysis of secondary electron emission for conducting materials using 4-grid LEED/AES optics. J. Phys. D Appl. Phys. 48, 195204 (2015)
Sickafus, E.N.: A secondary emission analog for improved auger spectroscopy with retarding potential analyzers. Rev. Sci. Instrum. 42(7), 933–941 (1971)
Wei, P.S.P., Cho, A.Y., Caldwell, C.W.: Instrumental effects of the retarding grids in a LEED apparatus. Rev. Sci. Instrum. 40(8), 1075–1079 (1969)
Cazaux, J.: Work function effects on the positive charging of supported insulating samples exposed to X-rays (as in XPS) and other irradiations. J. Electron Spectrosc. Relat. Phenom. 192, 40–51 (2014)
Scholtz, J.J., Schmitz, R.W.A., Hendriks, B.H.W., de Zwart, S.T.: Description of the influence of charging on the measurement of the secondary electron yield of MgO. Appl. Surf. Sci. 111, 259–264 (1997)
Fakhfakh, S., Jbara, O., Rondot, S., Hadjadj, A., Patat, J.M., Fakhfakh, Z.: Analysis of electrical charging and discharging kinetics of different glasses under electron irradiation in a scanning electron microscope. J. Appl. Phys. 108, 093705 (2010)
Johnson, J.B., McKay, K.G.: Phys. Rev. 91(3), 582 (1953)
Cazaux, J.: About the charge compensation of insulating samples in XPS. J. Electron Spectrosc. Relat. Phenom. 113, 15–33 (2000)
Cazaux, J., Lehuede, P.: Some physical descriptions of charging effects of insulators under incident particle bombardment. J. Electron Spectrosc. Relat. Phenom. 59, 49–71 (1992)
Weng, M., Cao, M., Zhao, H.-J., Zhang, H.-B.: A simple charge neutralization method for measuring the secondary electron. Rev. Sci. Instrum. 85, 036108 (2014)
Gonski, H., Freund, H.J., Hohlneicher, G.: On the importance of photoconduction in ESCA experiments. J. Electron Spectrosc. Rel. Phenom. 12, 435 (1977)
Handel, K.J.: A two electron gun technique for the measurement of secondary emission characteristics of a variety of materials. IEEE Trans. Electron Dev. 13(6), 525 (1966)
Vallayer, B., Saito, Y., Treheux, D.: Proceedings 2nd International Conference on Solid Dielectrics CSC2, Antibes France April 1995, Société Française du Vide, Paris, p. 589 (1995)
Cazaux, J.: Some considerations on the electric field induced in insulators by electron bombardment. J. Appl. Phys. 59, 1418–1430 (1986)
Qunn, X., Ji, Y., Zhang, H., Zhang, Y., Xuedong, X., Zhong, T.: Charging compensation of alumina samples by using all oxygen micro-injector in environmental scanning. Electron Microsc. Scan. 28(5), 289–293 (2006)
Ji, Y., Guo, H.S., Zhong, T.X., Zhang, H., Quan, X.L., Zhang, Y.Q., Xu, X.D.: Charge and charging compensation on oxides and hydroxides in oxygen environmental SEM. Ultramicroscopy 103, 191–198 (2005)
Totll, M., Thiel, B.L., Donald, A.M.: Interpretation of secondary electron images obtained using a low vacuum SEM. Ultramicroscopy 94, 71–87 (2003)
Cazaux, J., Gressus, C.L.: Phenomena relating to charging in insulators: microscopic effects and microscopy cause. Scan. Microsc. 5(1), 17–27 (1991)
Ichmura, S., Bauer, H.E., Seiler, H., Hofmann, S.: Reduction of charging in surface analysis of insulating materials by AES. Surf. Interface Anal. 14, 250 (1989)
Bass, A.D., Cloutier, P., Sanche, L.: J. Appl. Phys. 84, 2740 (1998)
Huchital, D.A., Mc Kean, R.T.: Appl. Phys. Lett. 20, 158 (1972)
Liehr, M., Thiry, P.A., Pireaux, J.J., Caudano, R.: Phys. Rev. B 33, 5682 (1986)
Geller, J.D.: Proceedings of 2nd International Conference on Solid Dielectrics CSC2 Antibes, France 1995, Ibid. Le Vide Sup 275, p. 644 (1995)
Wachtendorf, C., Herweg, C., Daeuber, M., Benedikt, J., von Keudell, A.: Thin film growth from a low pressure plasma excited in a supersonic expanding gas jet. J. Phys. D Appl. Phys. 42, 095205 (2009)
Qing, Z., Otorbaev, D.K., Brussaard, G.J.H., van de Sanden, M.C.M., Schram, D.C.: Diagnostics of the magnetized low-pressure hydrogen plasma jet molecular regime. J. Appl. Phys. 80(3), 1312–1324 (1996)
Šícha, M., Hubicka, Z., Soukup, L., Jastrabík, L., Cada, M., Špatenka, P.: Low-pressure RF multi-plasma-jet system for deposition of alloy and composite thin films. Surf. Coat. Technol. 148, 199–205 (2001)
Caldirola, S., Barni, R., Roman, H.E., Riccardi, C.: Mass spectrometry measurements of a low pressure expanding plasma jet. J. Vac. Sci. Technol. A 33, 061306 (2015). https://doi.org/10.1116/1.4931612
Itou, Y., Hirai, E., Shimakawa, T.: Estimation of minimum power consumption and pumps cost for the differential pumping system. Appl. Surf. Sci. 169–170, 792–798 (2001)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2018 Springer Nature Singapore Pte Ltd.
About this paper
Cite this paper
Li, J., Liu, S., Yan, B. (2018). A New Design for Secondary Electron Measurement and Application. In: Liu, ZA. (eds) Proceedings of International Conference on Technology and Instrumentation in Particle Physics 2017. TIPP 2017. Springer Proceedings in Physics, vol 213. Springer, Singapore. https://doi.org/10.1007/978-981-13-1316-5_42
Download citation
DOI: https://doi.org/10.1007/978-981-13-1316-5_42
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-13-1315-8
Online ISBN: 978-981-13-1316-5
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)