Abstract
This chapter presents a novel equivalent circuit modeling approach for the modal analysis of a MEMS cantilever beam. The modal solution is implemented in the circuit model, which provides the spatial displacement in steady-state and dynamic conditions. The sinusoidal excitation is employed to study the transient solution of mode shapes. As a test case, the steady-state displacement along the length of 40 µm cantilever is determined under different modes and compared with the results obtained by MATLAB simulation, which indicates a good agreement.
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Kavitha, C., Madhan, M.G. (2019). A Novel Equivalent Circuit Approach for Modal Analysis of MEMS Cantilever Beam. In: Nath, V., Mandal, J. (eds) Nanoelectronics, Circuits and Communication Systems . Lecture Notes in Electrical Engineering, vol 511. Springer, Singapore. https://doi.org/10.1007/978-981-13-0776-8_28
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DOI: https://doi.org/10.1007/978-981-13-0776-8_28
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