Abstract
Microscopy is a widely used and resilient field which is essential for the analysis of typography, structure and composition right down to the atomic scale. The desired output from any form of microscope is either quantifiable or easily interpretable results, or both. The scanning electron microscope (SEM) provides images which are generally very simple to interpret as they appear similar to images which we are used to interpreting in the real world on a daily basis.
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References
Alkemade, P.F.A., van Veldhoven, E.: Deposition, milling and etching with a focused helium ion beam, in Nanofabrication: techniques and principles. Springer (2011)
Fox, D., Chen, Y., Faulkner, C.C., Zhang, H.: Nano-structuring, surface and bulk modification with a focused helium ion beam. Beilstein J. Nanotechnol. 3, 579–585 (2012)
Gianuzzi, L., Stevie. F.A.: Introduction to Focused Ion Beams, chapter The Basic FIB Instrument, p. 7. Springer (2006)
Hill, R., Notte, J.A., Scipioni, L.: Scanning helium ion microscopy. Ad. Imaging Electron Phys. 170, 1–272 (2012)
Hovongton, P., Drouin, D.: Monte carlo simulation of electron trajectory in solids (2013). http://www.gel.usherbrooke.ca/casino/index.html
Jepson, M.A.E., Inkson, B.J., Liu, X., Scipioni, L., Rodenburg, C.: Quantitative dopant contrast in the helium ion microscope. Europhys. Lett. 86, 26005 (2009)
Jiang, D., Cooper, V.R., Dai, S.: Porous graphene as the ultimate membrane for gas separation. Nano Lett. 9(12), 4019–4024 (2009)
Kostinski, S., Yao, N.: Rutherford backscattering oscillation in scanning helium-ion microscopy. J. Appl. Phys. 109, 064311 (2011)
Livengood, R., Tan, S., Greenzweig, Y., Notte, J., McVey, S.: Subsurface damage from helium ions as a function of dose, beam energy, and dose rate. J. Vac. Sci. Technol. B: Microelectron. Nanometer Struct. 27(6), 3244–3249 (2009)
Lysse, A., Carl Zeiss Inc. Peabody, MA
Petrov, Y., Vyvenko, O.: Secondary electron emission spectra and energy selective imaging in helium ion microscope. In: Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, volume 8036 of Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, May 2011
Pickard, D., Scipioni, L.: Graphene nano-ribbon patterning in the orion plus, Carl Zeiss application note (2014). http://www.tcd.ie/Physics/ultramicroscopy/teaching/PY5019/HIM/AN_Nano-Pore_Milling_with_the_Helium_Ion_Microsco-pe.pdf
Ramachandra, R., Griffin, B., Joy, D.: A model of secondary electron imaging in the helium ion scanning microscope. Ultramicroscopy 109(6), 748–757 (2009)
Rodenburg, C., Liu, X., Jepson, M.A.E., Zhou, Z., Rainforth, W.M., Rodenburg, J.M.: The role of helium ion microscopy in the characterisation of complex three-dimensional nanostructures. Ultramicroscopy 110(9), 1178–1184 (2010)
Schneider, G.F., Kowalczyk, S.W., Calado, V.E., Pandraud, G., Zandbergen, H.W., Vandersypen, L.M.K., Dekker, C.: DNA translocation through graphene nanopores. Nano Lett. 10(8), 3163–3167 (2010)
Scipioni, L., Stern, L.A., Notte, J., Sijbrandij, S., Griffin, B.: Helium ion microscopy. Adv. Mater. Processes 166(6), 27–30 (2008)
Scipioni, L., Sanford, C., van Veldhoven, E., Maas, D.: A design-of-experiments approach to characterizing beam-induced deposition in the helium ion microscope. Microsc. Today 5, 22–26 (2011)
Sidorkin, V., van Veldhoven, E., van der Drift, E., Alkemade, P., Salemink, H., Maas, D.: Sub-10-nm nanolithography with a scanning helium beam. J. Vac. Sci. Technol. B 27, 18–20 (2009)
Tapaszto, L., Dobrik, G., Lambin, P., Biro, L.P.: Tailoring the atomic structure of graphene nanoribbons by scanning tunnelling microscope lithography. Nature Nanotechnol. 3(7), 397–401 (2008)
Yang, J., Ferranti, D.C., Stern, L.A., Sanford, C.A., Huang, J., Ren, Z., Qin, L.C., AR, Hall: Rapid and precise scanning helium ion microscope milling of solid-state nanopores for biomolecule detection. Nanotechnology 22(28), 285–310 (2011)
Zhou, Y., Loh, K.P.: Making patterns on graphene. Adv. Mater. 22(32), 3615–3620 (2010)
Ziegler, J.F., Biersack, J.P., Ziegler, M.D.: Stopping and range of ions in matter. SRIM Co. (2008)
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Fox, D., Zhang, H. (2018). Helium Ion Microscopy. In: Wang, R., Wang, C., Zhang, H., Tao, J., Bai, X. (eds) Progress in Nanoscale Characterization and Manipulation. Springer Tracts in Modern Physics, vol 272. Springer, Singapore. https://doi.org/10.1007/978-981-13-0454-5_8
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DOI: https://doi.org/10.1007/978-981-13-0454-5_8
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