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Bionic Functional Structures by Femtosecond Laser Micro/nanofabrication Technologies pp 21–28Cite as

Key Technical Problems of Femtosecond Laser Bionic Surfaces

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Abstract

Researchers of micro/nano engineering laboratory of University of Science and Technology of China have established the femtosecond laser micro/nanofabrication system since 2001, as shown in Fig. 2.1. This micro/nanofabrication system is composed of femtosecond laser system, precision processing system, and control system.

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Authors and Affiliations

  1. Department of Precision Instrument and Machinery, University of Science and Technology of China, Hefei, China

    Guoqiang Li

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  1. Guoqiang Li
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Correspondence to Guoqiang Li .

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Li, G. (2018). Key Technical Problems of Femtosecond Laser Bionic Surfaces. In: Bionic Functional Structures by Femtosecond Laser Micro/nanofabrication Technologies. Springer Theses. Springer, Singapore. https://doi.org/10.1007/978-981-13-0359-3_2

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