Abstract
The paper presents a simple circuit for piezo-resistive pressure sensors which compensates the temperature dependency of sensors. The output of piezo-resistive sensors generally, decreases with the increase in temperature when subjected to constant voltage excitation. To control the change with temperature, a varying excitation method is used. The proposed technique utilizes current steering DACs and a digital controller to compensate the variations. The technique is experimentally verified at hardware level where the digital control circuit is implemented on FPGA and tested with ASICs comprising of interface circuit. For the purpose of compensation, temperature is sensed using the same sensor. The temperature resolved is less than 1 °C for a range of 10 °C to 70 °C with zero pressure correction technique. The test results for implementation show that the sensitivity and offset shift is compensated by a factor of 10 and 44 respectively. The complete fabricated chip, consisting of interface circuit and algorithm occupies 10 mm2 area.
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Acknowledgement
MEMS Group of CSIR-CEERI fabricated the pressure sensor. The designing of sensor was carried out by S. Santosh Kumar and Dr. B. D. Pant. The chip fabrication cost supported by DiT, India.
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Santosh, M., Bansal, A., Mishra, J., Behra, K.C., Bose, S.C. (2017). Characterization and Compensation Circuitry for Piezo-Resistive Pressure Sensor to Accommodate Temperature Induced Variation. In: Kaushik, B., Dasgupta, S., Singh, V. (eds) VLSI Design and Test. VDAT 2017. Communications in Computer and Information Science, vol 711. Springer, Singapore. https://doi.org/10.1007/978-981-10-7470-7_13
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DOI: https://doi.org/10.1007/978-981-10-7470-7_13
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