Abstract
This chapter describes the standard ion beam analysis methods such as Rutherford backscattering spectroscopy (RBS), elastic recoil detection (ERD), and nuclear reaction analysis (NRA). It provides the reader with an understanding of principles of these methods, experimental setup, and applications. The RBS can be applied to thin-film samples with a thickness of several micrometers and allows the atomic composition and distribution in the depth direction. The examples of the RBS for compositions analysis of tungsten oxide film are presented. The ERD provides the depth distributions of light elements such as hydrogen. The examples of the ERD analysis for hydrogen distribution of thin films and multilayered samples are presented. The NRA using a 15N resonant nuclear reaction provides hydrogen distribution of thin films in detail. The methods presented in this chapter are being used as effective means of analyses of interface structures and the behavior of light elements, which are important in studies on thin films and multilayered materials.
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References
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Further Readings
Chu WK, Mayer JW, Nicolet MA (1978) Backscattering spectrometry. Academic, New York
Bird JR, Williams JS (eds) (1989) Ion beams for materials analysis. Academic, Sydney
Tesmer JR, Nastasi M (eds) (1995) Handbook of modern ion beam materials analysis. Materials Research Society, Warendale
Fujimoto F, Komaki K (kyohen) (1995) Ion bi-mu kogaku – ion・kotai sogo sayo hen, Uchida Rokakuho, Tokyo (in Japanese); Fujimoto F, Komaki K (1995) Ion beam engineering – interactions between ions and solids. Uchida Rokakuho Publishing Co., Ltd., Tokyo. (in Japanese)
Fujimoto F, Komaki K (kyohen) (2000) Ion bi-mu ni yoru busshitsu bunseki・busshitsu kaishitsu, Uchida Rokakuho, Tokyo (in Japanese); Fujimoto F, Komaki K (2000) Ion beam-based materials analysis and reforming. Uchida Rokakuho Publishing Co., Ltd., Tokyo. (in Japanese)
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Exercises
Exercises
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1.
An analysis beam that had been made by accelerating 4He to 2.0 MeV was projected onto a single-element sample and backscattered He particles were detected at a scattering angle of 160°. The highest backscattering energy was 1.85 MeV. What element is the sample made of?
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(a)
Carbon (C)
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(b)
Aluminum (Al)
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(c)
Cobalt (Co)
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(d)
Gold (Au)
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(a)
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2.
Cite two appropriate mass separability improvement methods for Rutherford’s backscattering.
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Yamamoto, S. (2018). Ion Beam Analysis of Materials. In: Kudo, H. (eds) Radiation Applications. An Advanced Course in Nuclear Engineering, vol 07. Springer, Singapore. https://doi.org/10.1007/978-981-10-7350-2_12
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DOI: https://doi.org/10.1007/978-981-10-7350-2_12
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