Abstract
Control schemes for nanopositioners typically combine damping and tracking. Due to the positioning performance requirements of the nanopositioning system, it is desirable for the closed-loop frequency response of the nanopositioner to mimic ripple-free pass-band low-pass characteristics. Earlier reports are available on simultaneous damping and tracking control emulating a Butterworth filter design, but this technique only incorporates a single integrator for tracking, which is inadequate for error-free tracking of the triangular and ramp-like signals typically used as input to nanopositioning systems. Double integral tracking guarantees error-free tracking, but is difficult to implement due to phase-related stability issues. In this work, a dual-loop integral tracking algorithm is proposed. Using simulation, it is shown that in the presence of hysteresis, the proposed dual-loop scheme delivers a more accurate positioning performance than the traditional single-loop integral tracking strategy.
The original version of this chapter was revised: The figure 4 and 5 was corrected. The erratum to this chapter is available at https://doi.org/10.1007/978-981-10-6463-0_61
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Altaher, M., Aphale, S.S. (2017). Multi-loop Damping and Tracking Strategy Emulating a Butterworth Pattern for Accurate Nanopositioning. In: Mohamed Ali, M., Wahid, H., Mohd Subha, N., Sahlan, S., Md. Yunus, M., Wahap, A. (eds) Modeling, Design and Simulation of Systems. AsiaSim 2017. Communications in Computer and Information Science, vol 751. Springer, Singapore. https://doi.org/10.1007/978-981-10-6463-0_2
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DOI: https://doi.org/10.1007/978-981-10-6463-0_2
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