Different particle beams have distinctive energy transfer modes and interaction mechanisms with graphene material, so in order to study the processing of graphene by particle beam irradiation, it is essential to make clear the phenomena of graphene under the impact of laser, ion beam, electron beam. By combining experiment and atomistic simulations, this chapter figured out the interaction mechanisms between particle beam and graphene. The damage threshold of graphene under particle beam irradiation was obtained, and the initiation and evolution of defects in graphene structure were observed. Meanwhile, the processing precision of the nanostructure was analyzed, as well as the discussion of the influence factors.
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