Abstract
In CAFM mode as shown in Fig. 9.1, which is based on contact mode, a bias voltage is applied during scanning between the probe and the sample, the current that flows is detected, and images of the in-plane distribution are created at the same time as images of the shape. Moreover, this system can evaluate electrical properties of the sample surface by I/V measurement function which can measure the current between the probe and the sample while sweeping the sample bias voltage.
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Fuji, R. (2018). Conductive Atomic Force Microscopy. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_9
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DOI: https://doi.org/10.1007/978-981-10-6156-1_9
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