Interferometer Displacement Measurement

  • Masaya TodaEmail author


The displacement measurement using optical interferometry is based on the observation of an interferogram caused by interfering two reflected lights from a sample surface and a reference mirror surface.


Surface profile Topography Deflection Bending 


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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Graduate School of EngineeringTohoku UniversitySendaiJapan

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