Imaging Ellipsometry

  • Akiko N. ItakuraEmail author


The measured signals in imaging ellipsometry are the change in polarization as the incident radiation interacts with the material structure of interest at each point on the surface.


Optical constant Polarization change Imaging Thickness mapping Surface uniformity 


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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Surface Physics and Characterization GroupNational Institute for Materials ScienceTsukubaJapan

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