High-Resolution Elastic Recoil Detection Analysis
HERDA is an advanced type of Elastic Recoil Detection Analysis (ERDA), depth resolution of which is improved. Figure 40.1 shows a schematic illustration of HERDA. In HERDA, as in a conventional ERDA, a well-collimated beam of monoenergetic He or heavier ions is incident on a solid sample.
KeywordsIon scattering Hydrogen Light element Depth profiling High depth resolution
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