Focused Ion Beam Scanning Electron Microscope
Focused ion beam is rather a new type of ion beam. Its prominent feature is fine focusing ability around 100–10 nm.
KeywordsFocused ion beam Liquid metal ion source Secondary electron Scanning microscope Ion beam machining Channeling contrast
- 2.Sakamoto, T., Morita, M., Takami, A., Hatakeyama, S., Murano, K., Ogawa, H., Ueda, K,: Individual analysis of aerosol particles using a high-resolution TOF-SIMS, presented at ASSAAQ13 (Atmospheric Sciences and Applications to Air Quality)Google Scholar
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