• Toshihide TsuruEmail author


In general, since the amplitude and phase are different between the p- and s-polarizations of the reflected light, the reflected light is elliptically polarized. Ellipsometry precisely measures the shape of reflection ellipse by irradiating totally polarized light to a planer bulk surface, a thin film, and a multilayer.


Polarization Reflection Complex refractive index Film thickness Complex amplitude reflectance 


  1. 1.
    Azzam, R.M.A., Bashara, N.M.: Ellipsometry and polarized light. North-Holland, Amsterdam (1987)CrossRefGoogle Scholar
  2. 2.
    Tompkins, H.G., McGahan, W.A.: Spectroscopic ellipsometry and reflectometry: a user’s guide. Wiley, New York (1999)Google Scholar
  3. 3.
    Tompkins, H.G., Irene, E.A.: Handbook of ellipsometry. Willian Andrew, New York (2005)CrossRefGoogle Scholar
  4. 4.
    Yamamoto, M., Hotta, Y., Sato, M.: A tracking ellipsometer of picometer sensitivity enabling 0.1% sputtering-rate monitoring of EUV nanometer multilayer fabrication. Thin solid films 433, 224–229 (2003)CrossRefGoogle Scholar
  5. 5.
    Tosaka, A., Arakawa, I.: The comparative study of two dimensional condensation of Xe and Kr physisorbed on Ag(111) and Ag(100). Surf. Sci. 600, 1071–1076 (2006)CrossRefGoogle Scholar
  6. 6.
    Muller, R.H.: Definitions and conventions in ellipsometry. Surf. Sci. 16, 14–33 (1969)CrossRefGoogle Scholar
  7. 7.
    Yamamoto, M., Namioka, T.: In situ ellipsometric study of optical properties of ultrathin films. Appl. Opt. 31, 1612–1621 (1992)CrossRefGoogle Scholar
  8. 8.
    Tsuru, T., Tsutou, T., Yamamoto, M.: Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic null ellipsometer. Thin Solid Films 455–456, 705–709 (2004)CrossRefGoogle Scholar
  9. 9.
    Saxena, A.N.: Change in the phase and amplitude of polarized light reflected from a film-covered surface and their relations with the film thickness. J. Opt. Soc. Am. 55, 1061–1067 (1965)CrossRefGoogle Scholar

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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Yamagata UniversityYamagataJapan

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