Electron Backscatter Diffraction

  • Rika YodaEmail author


Electron backscatter diffraction patterns (EBSD patterns) can be used to determine the orientation of the crystal lattice. Principle of EBSD pattern is similar to Kikuchi pattern observed in transmission electron microscope (TEM). In the case of scanning electron microscope (SEM), when an electron beam enters a highly tilted crystalline material, it is inelastically scattered in all directions.


Scanning electron microscopy Electron backscatter diffraction Kikuchi pattern Crystal orientation 


  1. 1.
    ISO 24173 Microbeam analysis—Guideline for orientation measurement using electron backscatter diffraction (2009)Google Scholar
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    EDAX OIM manual (2013)Google Scholar
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    Oxford Instruments CHANNEL 5 manual (2009)Google Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Material Solutions DivisionKobelco Research Institute, IncKobeJapan

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