Elastic Recoil Detection Analysis

  • Daiichiro SekibaEmail author


ERDA is a complementary method to RBS. While RBS is a way sensitive to heavy elements, ERDA is effective to quantify light elements, particularly for hydrogen.


Rutherford scattering Ion beam analysis Electrostatic accelerator Light elements 


  1. 1.
    Doyle, B.-L., Peercy, P.-S.: Technique for profiling 1H with 2.5-MeV Van de Graaff accelerators. Appl. Phys. Lett. 34, 811–813 (1979)CrossRefGoogle Scholar
  2. 2.
    Sekiba, D., Horikoshi, M., Abe, S., Ishii, S.: Mg segregation in Mg-rich Mg-Ni switchable mirror studied by Rutherford backscattering, elastic recoil detection analysis, and nuclear reaction analysis, J. Appl. Phys. 106, 114912/1-114912/5 (2009)CrossRefGoogle Scholar
  3. 3.
    Wielunski, M., Mayer, M., Behrisch, R., Roth, J., Scherzer, B.-M.-U.: Simultaneous profiling of hydrogen and deuterium by 2.6 MeV 4He ERDA using a ∆E-E telescope detector. Nucl. Instr. Meth. Phys. Res. B 122, 113–120 (1997)CrossRefGoogle Scholar
  4. 4.
    Harayama, I., Nagashima, K., Hirose, Y., Matsuzaki, H., Sekiba, D.: Development of DE-E telescope ERDA with 40 MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films, Nucl. Instr. Meth. Phys. Res. B 384, 61–67 (2016)CrossRefGoogle Scholar
  5. 5.
    Giangrandi, S., Sajavaara, T., Brijs, B., Arstila, K., Vantomme, A., Vandervorst, W.: Los-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films. Nucl. Instr. Meth. Phys. Res. B 266, 5144–5150 (2008)CrossRefGoogle Scholar
  6. 6.
    Sekiba, D., Takemoto, N., Okada, M., Ishii, S., Sakurai, T., Akimoto, K.: Hydrogen isotope tracer experiment in a-C: H deposition: reactive RF magnetron sputtering with CH4 and D2. Diam. Relat. Mater. 27–28, 60–63 (2012)CrossRefGoogle Scholar
  7. 7.
    For example, SIMNRA, (

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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Institute of Applied Physics, University of TsukubaTsukubaJapan

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