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Elastic Recoil Detection Analysis

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Compendium of Surface and Interface Analysis

Abstract

ERDA is a complementary method to RBS. While RBS is a way sensitive to heavy elements, ERDA is effective to quantify light elements, particularly for hydrogen.

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References

  1. Doyle, B.-L., Peercy, P.-S.: Technique for profiling 1H with 2.5-MeV Van de Graaff accelerators. Appl. Phys. Lett. 34, 811–813 (1979)

    Article  CAS  Google Scholar 

  2. Sekiba, D., Horikoshi, M., Abe, S., Ishii, S.: Mg segregation in Mg-rich Mg-Ni switchable mirror studied by Rutherford backscattering, elastic recoil detection analysis, and nuclear reaction analysis, J. Appl. Phys. 106, 114912/1-114912/5 (2009)

    Article  Google Scholar 

  3. Wielunski, M., Mayer, M., Behrisch, R., Roth, J., Scherzer, B.-M.-U.: Simultaneous profiling of hydrogen and deuterium by 2.6 MeV 4He ERDA using a ∆E-E telescope detector. Nucl. Instr. Meth. Phys. Res. B 122, 113–120 (1997)

    Article  CAS  Google Scholar 

  4. Harayama, I., Nagashima, K., Hirose, Y., Matsuzaki, H., Sekiba, D.: Development of DE-E telescope ERDA with 40 MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films, Nucl. Instr. Meth. Phys. Res. B 384, 61–67 (2016)

    Article  CAS  Google Scholar 

  5. Giangrandi, S., Sajavaara, T., Brijs, B., Arstila, K., Vantomme, A., Vandervorst, W.: Los-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films. Nucl. Instr. Meth. Phys. Res. B 266, 5144–5150 (2008)

    Article  CAS  Google Scholar 

  6. Sekiba, D., Takemoto, N., Okada, M., Ishii, S., Sakurai, T., Akimoto, K.: Hydrogen isotope tracer experiment in a-C: H deposition: reactive RF magnetron sputtering with CH4 and D2. Diam. Relat. Mater. 27–28, 60–63 (2012)

    Article  Google Scholar 

  7. For example, SIMNRA, (http://home.mpcdf.mpg.de/~mam/)

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Authors and Affiliations

  1. Institute of Applied Physics, University of Tsukuba, Tandem Accelerator Complex, Tsukuba, Japan

    Daiichiro Sekiba

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  1. Daiichiro Sekiba
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Correspondence to Daiichiro Sekiba .

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Editors and Affiliations

  1. Tokyo, Japan

    The Surface Science Society of Japan

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Sekiba, D. (2018). Elastic Recoil Detection Analysis. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_12

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