Abstract
In this paper, we study the heterostructure p-MOSFETs with Silicon–Germanium channel. This chapter deals with the hole confinement in the SiGe well and the design trade-off for Si1−x Ge x p-channel MOSFET devices. Also the selection of gate electrode, optimization of SiGe channel width and profile, Si cap and gate oxide thicknesses and the method of threshold voltage adjustment have been addressed.
References
D. Kahng, M.M. Atalla, Silicon-silicon dioxide field induced surface devices, in Solid-State Device Research Conference, Carnegie Institute of Technology, Pittsburgh, PA, 1960
Semiconductor Industry Association, The International Technology Roadmap for Semiconductors
T. Low, Y.T. Hou, M.F. Li, C. Zhu, A. Chin, G. Samudra, L. Chan, D.L. Kwong, investigation of performance limits of germanium double-gated MOSFETs, in Proceedings of IEDM, 2003, p. 691
A. Pethe, T. Krishnamohan, D. Kim, S. Oh, H.S.P. Wong, Y. Nishi, K.C. Saraswat, investigation of the performance limits of III-V Double-Gate n-MOSFETs, in Proceedings of IEDM, 2005, p. 605
C.K. Maiti, N.B. Chakrabarti, S.K. Ray, Silicon Heterostructures: Materials and Devices (Institute of Electrical Engineers (IEE), UK, 2001)
L.K. Bera, in Studies on applications of strained-Si for heterostructure field effects transistors. PhD Thesis, IIT Kharagpur, 1998
S.H. Li, J.M. Hinckley, J. Singh, P.K. Bhattacharya, Carrier velocity-field characteristics and alloy scattering potential in Si1-xGex/Si. Appl. Phys. Lett. 63, 1393–1395 (1993)
D.K. Nayak, J.C.S. Woo, J.S. Park, K.L. Wang, K.P. MacWilliams, Enhancement-mode quantum-well Ge x Si1−x PMOS. IEEE Electron Dev. Lett. 1991;EDL-12:154–156
D.K. Nayak, J.C.S. Woo, G.K. Yabiku, K.P. MacWilliams, J.S. Park, K.L. Wang, High mobility GeSi PMOS on SIMOX. IEEE Electron Dev. Lett. 14, 520–522 (1993)
S. Verdonckt-Vandebroek, E. Crabbe, B.S. Meyerson, D.L. Harame, P.J. Restle, J.M.C. Stork, A.C. Meydanis, C.L. Stanis, A.A. Bright, G.M.W. Kroesen, A.C. Warren, High-mobility modulation-doped grades SiGe-channel p-MOSFET’s. IEEE Electron Dev. Lett. 1991;EDL-12, 447–449
S. Verdonckt-Vandebroek, E.F. Crabbe, B.S. Meyerson, D.L. Harame, P.J. Restle, J.M.C. Stork, J.B. Johnson, SiGe-channel heterojunction p-MOSFETs. IEEE Trans. Electron Dev. 41, 90–101 (1994)
K. Bhaumik, Y.S. Diamand, J.P. Noel, J. Bevk, L.C. Feldman, 23 GHz fT room temperature SiGe quantum-well p-MOSFETs, in Proceedings of ISDRS, 1993, p. 349–352
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Dash, T.P., Das, S., Nanda, R.K. (2018). Silicon–Germanium Channel Heterostructure p-MOSFETs. In: Nath, V. (eds) Proceedings of the International Conference on Microelectronics, Computing & Communication Systems. Lecture Notes in Electrical Engineering, vol 453. Springer, Singapore. https://doi.org/10.1007/978-981-10-5565-2_32
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DOI: https://doi.org/10.1007/978-981-10-5565-2_32
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