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Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 453))

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Abstract

In this paper, we study the heterostructure p-MOSFETs with Silicon–Germanium channel. This chapter deals with the hole confinement in the SiGe well and the design trade-off for Si1−x Ge x p-channel MOSFET devices. Also the selection of gate electrode, optimization of SiGe channel width and profile, Si cap and gate oxide thicknesses and the method of threshold voltage adjustment have been addressed.

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Correspondence to Tara Prasanna Dash .

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Dash, T.P., Das, S., Nanda, R.K. (2018). Silicon–Germanium Channel Heterostructure p-MOSFETs. In: Nath, V. (eds) Proceedings of the International Conference on Microelectronics, Computing & Communication Systems. Lecture Notes in Electrical Engineering, vol 453. Springer, Singapore. https://doi.org/10.1007/978-981-10-5565-2_32

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  • DOI: https://doi.org/10.1007/978-981-10-5565-2_32

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-5564-5

  • Online ISBN: 978-981-10-5565-2

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