Abstract
A flexible capacitive tactile sensor with micro needle structure is designed in this paper for the palm and fingers of the manipulator. The sensor has better sensitivity, stability and repeatability and the spatial layout of the manipulator tactile sensor is designed in this paper. The main raw material PDMS is prepared to meet the requirements of a flexible tactile sensor. The silicon-based MEMS technology is used to achieve a tiny micro needle structure. Experimental results show that the sensor is proved to work well and able to guarantee a better sensitivity at 30 N pressure.
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Acknowledgements
The authors would like to thank National High Technology Research and Development Program of China (863) (Grant Nos. 2012AA030308, 2013AA032204, 2014AA032901) National Basic Research Program of China (Grant No. 2011CB933203) National Natural Science Foundation of China (Grant Nos. 81300803, 61327809, 61474107, 61372060, 61335010, 61275200, 61178051) Grant for Capital Clinical Application Research with Characteristics (Grant No. Z141107002514061) Chinese Academy of Sciences Focus Fund (Grant No. KJZD-EW-L11-01). Also, we want to thank CHU ZHONG YI of Beijing University of Aeronautics & Astronautics.
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Zhang, J., Cui, J., Lu, Y., Zhang, X., Hu, X. (2017). A Flexible Capacitive Tactile Sensor for Manipulator. In: Sun, F., Liu, H., Hu, D. (eds) Cognitive Systems and Signal Processing. ICCSIP 2016. Communications in Computer and Information Science, vol 710. Springer, Singapore. https://doi.org/10.1007/978-981-10-5230-9_31
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DOI: https://doi.org/10.1007/978-981-10-5230-9_31
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