Abstract
Amorphous carbon films can be deposited by a range of deposition techniques. Presently, the magnetic data storage industry uses the following for the deposition of ultrathin carbon overcoats: (1) magnetron sputtering, (2) filtered cathodic vacuum arc (FCVA) and (3) plasma-enhanced chemical vapor deposition (PECVD)-based techniques. These three carbon overcoat fabrication techniques are discussed in this chapter.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
J. Robertson, Ultrathin carbon coatings for magnetic storage technology. Thin Solid Films 383, 81 (2001)
J.W. Bradley, H. Bäcker, P.J. Kelly, R.D. Arnell, Time-resolved Langmuir probe measurements at the substrate position in a pulsed mid-frequency DC magnetron plasma. Surf. Coat. Technol. 135, 221 (2001)
N. Dwivedi, R.J. Yeo, P.S. Goohpattader, N. Satyanarayana, S. Tripathy, C.S. Bhatia, Enhanced characteristics of pulsed DC sputtered ultrathin (<2nm) amorphous carbon overcoats on hard disk magnetic media. Diam. Relat. Mater. 51, 14 (2015)
P.J. Kelly, C.F. Beevers, P.S. Henderson, R.D. Arnell, J.W. Bradley, H. Bäcker, A comparison of the properties of titanium-based films produced by pulsed and continuous DC magnetron sputtering. Surf. Coat. Technol. 174–175, 795 (2003)
A. Tomala, A. Pauschitz, M. Roy, Nanotribology of pulsed direct current magnetron sputtered diamond like carbon films. Surf. Sci. 616, 60 (2013)
A. Anders, Cathodic arcs: from fractal spots to energetic condensation, in Springer Series on Atomic, Optical, and Plasma Physics, vol. 50 (Springer Science+Business Media, New York, NY, USA, 2008)
Y. Lifshitz, Diamond-like carbon—present status. Diam. Relat. Mater. 8, 1659 (1999)
M. Chhowalla, J. Robertson, C.W. Chen, S.R.P. Silva, C.A. Davis, G.A.J. Amaratunga, W.I. Milne, Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films. J. Appl. Phys. 81, 139 (1997)
H. Inaba, K. Furusawa, S. Sasaki, Filtered cathodic vacuum arc process conditions and properties of thin tetrahedral amorphous carbon films. Jpn. J. Appl. Phys. 43, 2681 (2004)
H. Inaba, K. Furusawa, S. Hirano, S. Sasaki, S. Todoroki, M. Yamasaka, M. Endou, Tetrahedral amorphous carbon films by filtered cathodic vacuum-arc deposition for air-bearing-surface overcoat. Jpn. J. Appl. Phys. 42, 2824 (2003)
S. Schmidt, Z. Czigány, G. Greczynski, J. Jensen, L. Hultman, Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2. J. Appl. Phys. 112, 013305 (2012)
M. Weiler, S. Sattel, K. Jung, H. Ehrhardt, V.S. Veerasamy, J. Robertson, Highly tetrahedral, diamond-like amorphous hydrogenated carbon prepared from a plasma beam source. Appl. Phys. Lett. 64, 2797 (1994)
M. Weiler, K. Lang, E. Li, J. Robertson, Deposition of tetrahedral hydrogenated amorphous carbon using a novel electron cyclotron wave resonance reactor. Appl. Phys. Lett. 72, 1314 (1998)
D.J. O’Connor, B.A. Sexton, R.S.C. Smart, Surface Analysis Methods in Materials Science, vol. 23, 2nd edn. (Springer, New York, NY, USA, 2003)
M. Sardela, Practical Materials Characterization, 1st edn. (Springer, New York, NY, USA, 2014)
M.A. Samad, E. Rismani, H. Yang, S.K. Sinha, C.S. Bhatia, Overcoat free magnetic media for lower magnetic spacing and improved tribological properties for higher areal densities. Tribol. Lett. 43, 247 (2011)
E. Rismani, S.K. Sinha, S. Tripathy, H. Yang, C.S. Bhatia, Effect of pre-treatment of the substrate surface by energetic C+ ion bombardment on structure and nano-tribological characteristics of ultra-thin tetrahedral amorphous carbon (ta-C) protective coatings. J. Phys. D Appl. Phys. 44, 115502 (2011)
B. Balakrisnan, B. Tomcik, D.J. Blackwood, Influence of carbon sputtering conditions on corrosion protection of magnetic layer by an electrochemical technique. J. Electrochem. Soc. 149, B84 (2002)
R.J. Yeo, E. Rismani, N. Dwivedi, D.J. Blackwood, H.R. Tan, Z. Zhang, S. Tripathy, C.S. Bhatia, Bi-level surface modification of hard disk media by carbon using filtered cathodic vacuum arc: reduced overcoat thickness without reduced corrosion performance. Diam. Relat. Mater. 44, 100 (2014)
D.G. Enos, L.L. Scribner, The Potentiodynamic Polarization Scan. Solartron Analytical, Hampshire, UK, Technical Report 33, Jan 1997
T.P. Hoar, On the relation between corrosion rate and polarization resistance. Corros. Sci. 7, 455 (1967)
M. Hakovirta, J. Salo, R. Lappalainen, A. Anttila, Correlation of carbon ion energy with sp2/sp3 ratio in amorphous diamond films produced with a mass-separated ion beam. Phys. Lett. A 205, 287 (1995)
W.C. Oliver, G.M. Pharr, Measurement of hardness and elastic modulus by instrumented indentation: advances in understanding and refinements to methodology. J. Mater. Res. 19, 3 (2004)
R.J. Yeo, N. Dwivedi, L. Zhang, Z. Zhang, C.Y.H. Lim, S. Tripathy, C.S. Bhatia, Durable ultrathin silicon nitride/carbon bilayer overcoats for magnetic heads: the role of enhanced interfacial bonding. J. Appl. Phys. 117, 045310 (2015)
B. Raeymaekers, F.E. Talke, Measurement and sources of lateral tape motion: a review. J. Tribol. 131, 011903 (2008)
A.C. Ferrari, J. Robertson, Interpretation of Raman spectra of disordered and amorphous carbon. Phys. Rev. B Condens. Matter 61, 14095 (2000)
A.C. Ferrari, J. Robertson, Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond. Philos. Trans. R. Soc. Lond. Ser. A 362, 2477 (2004)
J. Robertson, Diamond-like amorphous carbon. Mater. Sci. Eng. R-Rep. 37, 129 (2002)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
Copyright information
© 2017 Springer Nature Singapore Pte Ltd.
About this chapter
Cite this chapter
Yeo, R.J. (2017). Overcoat Fabrication and Characterization. In: Ultrathin Carbon-Based Overcoats for Extremely High Density Magnetic Recording. Springer Theses. Springer, Singapore. https://doi.org/10.1007/978-981-10-4882-1_3
Download citation
DOI: https://doi.org/10.1007/978-981-10-4882-1_3
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-10-4881-4
Online ISBN: 978-981-10-4882-1
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)