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Overcoat Fabrication and Characterization

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Part of the Springer Theses book series (Springer Theses)

Abstract

Amorphous carbon films can be deposited by a range of deposition techniques. Presently, the magnetic data storage industry uses the following for the deposition of ultrathin carbon overcoats: (1) magnetron sputtering, (2) filtered cathodic vacuum arc (FCVA) and (3) plasma-enhanced chemical vapor deposition (PECVD)-based techniques. These three carbon overcoat fabrication techniques are discussed in this chapter.

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© Springer Nature Singapore Pte Ltd. 2017

Authors and Affiliations

  1. 1.Department of Electrical and Computer EngineeringNational University of SingaporeSingaporeSingapore

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