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Electron Diffraction Techniques in the SEM

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Field Emission Scanning Electron Microscopy

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Abstract

The first observation of an electron diffraction pattern from a bulk specimen by Coates and co-workers in 1967 (Coates 1967) in the form of an electron channeling pattern (ECP) is taken nowadays as the birth of electron diffraction techniques in the SEM. Before this date, electron diffraction was solely a TEM experiment.

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Authors and Affiliations

  1. Department of Mining and Materials Engineering, McGill University, Montreal, QC, Canada

    Nicolas Brodusch, Hendrix Demers & Raynald Gauvin

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  1. Nicolas Brodusch
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Correspondence to Nicolas Brodusch .

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Brodusch, N., Demers, H., Gauvin, R. (2018). Electron Diffraction Techniques in the SEM. In: Field Emission Scanning Electron Microscopy. SpringerBriefs in Applied Sciences and Technology. Springer, Singapore. https://doi.org/10.1007/978-981-10-4433-5_8

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