Skip to main content
SpringerLink
Log in

Electron Detection Strategies for High Resolution Imaging: Deceleration and Energy Filtration

  • Chapter
  • First Online:
Field Emission Scanning Electron Microscopy

Part of the book series: SpringerBriefs in Applied Sciences and Technology ((BRIEFSAPPLSCIENCES))

  • 1729 Accesses

Abstract

From the early beginning, the reflected and transmitted electrons produced after the interaction of a high energy electron beam with a specimen surface were collected by placing electron detectors around and below the specimen at specific locations inside the specimen chamber.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 59.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 79.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  • Agemura, T., Nomaguchi, T., & Joy, D. (2011). Digital BSE imaging on SEMs. Microscopy and Microanalysis, 17, 914.

    Article  Google Scholar 

  • Aoyama, T., Nagoshi, M., & Sato, K. (2015). Quantitative analysis of angle-selective backscattering electron image of iron oxide and steel. Microscopy, 64(5), 319–325.

    Google Scholar 

  • Asahina, S., Uno, S., Suga, M., Stevens, S. M., Klingstedt, M., Okano, Y., et al. (2011). A new HRSEM approach to observe fine structures of novel nanostructured materials. Microporous and Mesoporous Materials, 146, 11–17.

    Google Scholar 

  • Berger, D., & Niedrig, H. (2002). Energy distribution of electron backscattering from crystals and relation to electron backscattering patterns and electron channeling patterns. Scanning, 24, 70–74.

    Article  Google Scholar 

  • Bhattacharyya, A., & Eades, J. A. (2009). Use of an energy filter to improve the spatial resolution of electron backscatter diffraction. Scanning, 31, 114–121.

    Article  Google Scholar 

  • Brodusch, N., Demers, H., & Gauvin, R. (2013). Dark-field imaging of thin specimens with a forescatter electron detector at low accelerating voltage. Microscopy and microanalysis: The Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada, 1–10.

    Google Scholar 

  • Cazaux, J. (2004). About the role of the various types of secondary electrons (SE1; SE2; SE3) on the performance of LVSEM. Journal of Microscopy, 214, 341–347.

    Article  Google Scholar 

  • Cazaux, J. (2005). Recent developments and new strategies in scanning electron microscopy. Journal of Microscopy, 217, 16–35.

    Article  Google Scholar 

  • Cazaux, J., Kuwano, N., & Sato, K. (2013). Backscattered electron imaging at low emerging angles: A physical approach to contrast in LVSEM. Ultramicroscopy, 135, 43–49.

    Article  Google Scholar 

  • Deal, A., Hooghan, T., & Eades, A. (2008). Energy-filtered electron backscatter diffraction. Ultramicroscopy, 108, 116–125.

    Article  Google Scholar 

  • Drouin, D., Couture, A. R., Joly, D., Tastet, X., Aimez, V., & Gauvin, R. (2007). CASINO V2. 42—A fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users. Scanning, 29, 92–101.

    Google Scholar 

  • Everhart, T., & Thornley, R. (1960). Wide-band detector for micro-microampere low-energy electron currents. Journal of Scientific Instruments, 37, 246.

    Article  Google Scholar 

  • Gauvin, R., & Michaud, P. (2009). MC X-ray, a new monte carlo program for quantitative X-ray microanalysis of real materials. Microscopy and Microanalysis, 15, 488.

    Article  Google Scholar 

  • Jaksch, H. (2008a). Low loss BSE imaging with the EsB detection system on the gemini ultra FE-SEM. In EMC 2008 14th European Microscopy Congress, September 1–5, 2008, Aachen, Germany.

    Google Scholar 

  • Jaksch, H. (2008b). Strain related contrast mechanisms in crystalline materials imaged with AsB detection. In EMC 2008 14th European Microscopy Congress, September 1–5, 2008, Aachen, Germany.

    Google Scholar 

  • Jaksch, H. (2011). The contrast mechanisms of LL-BSE electrons in FE-SEM characterization of polymer, single proteins, and oxidization states of elements. Microscopy and Microanalysis, 17, 902–903.

    Article  Google Scholar 

  • Jaksch, H. (2012a). Hybridisation & band gap contrast from LL-BSE electrons. Microscopy and Microanalysis, 18, 704–705.

    Article  Google Scholar 

  • Jaksch, H. (2012b). What BSE electrons can tell us. From ECCI via RBS to low loss BSE imaging. Microscopy and Microanalysis, 18, 680–681.

    Article  Google Scholar 

  • Jaksch, H., & Martin, J. (1995). High-resolution, low-voltage SEM for true surface imaging and analysis. Fresenius’ Journal of Analytical Chemistry, 353, 378–382.

    Article  Google Scholar 

  • Jaksch, H., & Vermeulen, J. (2005). New developments in GEMINI FESEM technology. Microscopy Today, 13, 8–10.

    Google Scholar 

  • Joy, D. (2002). SMART—A program to measure SEM resolution and imaging performance. Journal of Microscopy, 208, 24–34.

    Article  Google Scholar 

  • Joy, D. C. (1984). Beam interactions, contrast and resolution in the SEM. Journal of Microscopy, 136, 241–258.

    Article  Google Scholar 

  • Joy, D. C. (1985). Resolution in low voltage scanning electron microscopy. Journal of Microscopy, 140, 283–292.

    Article  Google Scholar 

  • Joy, D. C., Newbury, D. E., & Davidson, D. L. (1982). Electron channeling patterns in the scanning electron microscope. Journal of Applied Physics, 53, R81–R122.

    Article  Google Scholar 

  • Kim, K. W., & Jaksch, H. (2009). Compositional contrast of uncoated fungal spores and stained section-face by low-loss backscattered electron imaging. Micron, 40, 724–729.

    Article  Google Scholar 

  • Koshikawa, T., & Shimizu, R. (1974). A Monte Carlo calculation of low-energy secondary electron emission from metals. Journal of Physics D: Applied Physics, 7, 1303.

    Article  Google Scholar 

  • Merli, P., Migliori, A., Morandi, V., & Rosa, R. (2001). Spatial resolution and energy filtering of backscattered electron images in scanning electron microscopy. Ultramicroscopy, 88, 139–150.

    Article  Google Scholar 

  • Murata, K. (1976). Depth resolution of the low-and high-deflection backscattered electron images in the scanning electron microscope. Physica Status Solidi (a), 36, 527–532.

    Google Scholar 

  • Newbury, D., Yakowitz, H., & Myklebust, R. (1973). Monte Carlo calculations of magnetic contrast from cubic materials in the scanning electron microscope. Applied Physics Letters, 23, 488–490.

    Article  Google Scholar 

  • Newbury D., Yakowitz H., & Myklebust L. (1976). A study of type II magnetic domain contrast in the SEM by Monte Carlo electron trajectory simulation. In Use of Monte Carlo Calculations in Electron Probe Microanalysis and Scanning Electron Microscopy: Proceedings of a Workshop Held at the National Bureau of Standards, Gaithersburg, Maryland, October 1–3, 1975. US Department of Commerce, National Bureau of Standards: for sale by the Superintendent of Documents, U.S. Government Printing Office.

    Google Scholar 

  • Rasband, W. S. (1997–2015). Image J. Maryland, USA: Bethesda. https://imagej.nih.gov/ij/.

  • Reimer, L. (1993). Image formation in low-voltage scanning electron microscopy. In L. Reimer (Ed.), Image formation in low-voltage scanning electron microscopy. USA: SPIE-International Society for Optical Engineering.

    Google Scholar 

  • Reimer, L. (1998). Scanning electron microscopy: Physics of image formation and microanalysis (Springer Series in Optical Sciences). Berlin: Springer.

    Google Scholar 

  • Reimer, L., & Volbert, B. (1979). Detector system for backscattered electrons by conversion to secondary electrons. Scanning, 2, 238–248.

    Article  Google Scholar 

  • Tsurumi, D., Hamada, K., & Kawasaki, Y. (2010). Energy-filtered imaging in a scanning electron microscope for dopant contrast in InP. Journal of Electron Microscopy, 59, S183–S187.

    Article  Google Scholar 

  • Wells, O. C. (1970). New contrast mechanism for scanning electron microscope. Applied Physics Letters, 16, 151–153.

    Article  Google Scholar 

  • Wells, O. C. (1971). Low-loss image for surface scanning electron microscope. Applied Physics Letters, 19, 232–235.

    Article  Google Scholar 

  • Wells, O. C. (1974). Scanning electron microscopy, USA: McGraw-Hill.

    Google Scholar 

  • Wells, O. C. (1979). Effects of collector take-off angle and energy filtering on the BSE image in the SEM. Scanning, 2, 199–216.

    Article  Google Scholar 

  • Wells, O. C., Broers, A., & Bremer, C. (1973). Method for examining solid specimens with improved resolution in the scanning electron microscope (SEM). Applied Physics Letters, 23, 353–355.

    Article  Google Scholar 

  • Wells, O. C., LeGoues, F., & Hodgson, R. (1990). In-lens low-loss electron detector for the upper specimen stage in the SEM. Electron Microscopy 1990, 1, 382.

    Google Scholar 

  • Zach, J. (1989). Design of a high-resolution low-voltage scanning electron microscope. Optik, 83, 30–40.

    Google Scholar 

  • Zach, J., & Rose, H. (1986). Efficient detection of secondary electrons in low-voltage scanning electron microscopy. Scanning, 8, 285–293.

    Article  Google Scholar 

  • Zach, J., & Rose, H. (1988). High-resolution low-voltage electron-microprobe with large SE detection efficiency. In Institute of Physics Conference Series, 81–82.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Mining and Materials Engineering, McGill University, Montreal, QC, Canada

    Nicolas Brodusch, Hendrix Demers & Raynald Gauvin

Authors
  1. Nicolas Brodusch
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Hendrix Demers
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Raynald Gauvin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Nicolas Brodusch .

Rights and permissions

Reprints and permissions

Copyright information

© 2018 The Author(s)

About this chapter

Cite this chapter

Brodusch, N., Demers, H., Gauvin, R. (2018). Electron Detection Strategies for High Resolution Imaging: Deceleration and Energy Filtration. In: Field Emission Scanning Electron Microscopy. SpringerBriefs in Applied Sciences and Technology. Springer, Singapore. https://doi.org/10.1007/978-981-10-4433-5_3

Download citation

Publish with us

Policies and ethics

Search

Navigation