Abstract
In this chapter, the generation of plasma by gaseous electrical discharge will be discussed. Townsend Theory of electrical breakdown of gases will be explained. Various types of discharge, including to corona discharge, glow discharge and arc discharge and the characteristics of the plasmas produced will be introduced. The electrical power sources used for the generation of these plasma including DC, AC, RF, microwave and pulsed capacitor discharge are introduced.
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References
Weston GF (1968) Cold cathode glow discharge tubes (Chap. 1). ILIFFE Books Ltd, London
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General References
Grey MC (1965) Fundamentals of electrical discharges in gases, part 1, vol 2. In: Beck AH (ed) Handbook of vacuum physics. Bergamon Press, Oxford
Reece RJ (1995) Industrial plasma engineering. Principles, vol 1. IOP Publishing Ltd, London
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Wong, C.S., Mongkolnavin, R. (2016). Methods of Plasma Generation. In: Elements of Plasma Technology. SpringerBriefs in Applied Sciences and Technology. Springer, Singapore. https://doi.org/10.1007/978-981-10-0117-8_2
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DOI: https://doi.org/10.1007/978-981-10-0117-8_2
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Publisher Name: Springer, Singapore
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Online ISBN: 978-981-10-0117-8
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