Abstract
We propose to use measurements of electrical resistance for estimation of the geometric dimensions of nanostructures made of conductive materials. Transistors, resistors and conductive paths inside integrated circuits are fabricated in a form of thin films of progressively smaller size. At present (2017) microprocessors of fabrication technology of 10 nm have been manufactured. The technology of 7 nm will be implemented next year and the technology of 5 nm is expected in 10 years. The dimension of 10 or 5 nm refers to the length of a gate of a MOSFET transistor inside the chip. For the next generation of nanostructures, the 3D nanostructures, their scaling will be continued and measurements of them will be also necessary.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
Landauer R (1957) Spatial variation of currents and fields due to localized scatteres in metallic conduction. IBM J Res Dev 1:223
Landauer R (1989) Conductance determined by transmission: probes and quantised constriction resistance. J Phys Condens Matter 1:8099
The International Technology Roadmap for Semiconductors (2016) Edition 2015. www.itrs.net/reports
Sharvin YV (1965) A possible method for studying Fermi surfaces. Zh Eksp Teor Fiz 48:984
Beenakker C, van Houten H (1991) Quantum transport in semiconductor nanostructures. Solid State Phys 44:1
Nawrocki W, Wawrzyniak M, Pajakowski J (2009) Transient states in electrical circuits with a nanowire. J Nanosci Nanotechnol 9:1350
Nawrocki W (2015) Introduction to quantum metrology. Quantum standards and instrumentation. Springer, Heidelberg
Ashcroft NW, Mermin ND (1976) Solid state physics. Hartcourt College Publisher, Orlanado
Kruchinin S (2016) Energy spectrum and wave function of electron in hybrid superconducting nanowires. Int J Mod Phys B 30(13):1042008
Kruchinin S, Pruschke T (2014) Thermopower for a molecule with vibrational degrees of freedom. Phys Lett A 378:157–161
Gall D (2016) Electron mean free path in elemental metals. J Appl Phys 119:085101
Acknowledgements
The authors are grateful for funding their scientific cooperation with the Bogoliubov – Infeld Programme fund. The paper was prepared with the financial support of the project No. 08/83/DSPB/4724 at Poznan University of Technology, Poland.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2018 Springer Science+Business Media B.V., part of Springer Nature
About this paper
Cite this paper
Nawrocki, W., Shukrinov, Y.M. (2018). Electrical Measurements of the Dimensions of Nanostructures. In: Bonča, J., Kruchinin, S. (eds) Nanostructured Materials for the Detection of CBRN. NATO Science for Peace and Security Series A: Chemistry and Biology. Springer, Dordrecht. https://doi.org/10.1007/978-94-024-1304-5_7
Download citation
DOI: https://doi.org/10.1007/978-94-024-1304-5_7
Published:
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-024-1303-8
Online ISBN: 978-94-024-1304-5
eBook Packages: Biomedical and Life SciencesBiomedical and Life Sciences (R0)