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Cyclic Nanoindentation for Examination of the Piezoresistivity and the Strain-Sensor Behavior of Indium-Tin-Oxide Thin Films

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Nanoscience Advances in CBRN Agents Detection, Information and Energy Security

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Abstract

The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from −1.4 to −3.7.

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Author information

Authors and Affiliations

  1. Institute of Applied Physics, ASM, Chisinau, Moldova

    E. E. Harea & K. M. Pyrtsac

  2. Aristotle University of Thessaloniki, Thessaloniki, Greece

    K. E. Aifantis

  3. University of Arizona, Tucson, AZ, USA

    K. E. Aifantis

  4. Ghitu Institute of Electronic Engineering and Nanotechnologies, Chisinau, Moldova

    L. Ghimpu

Authors
  1. E. E. Harea
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  2. K. E. Aifantis
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  3. K. M. Pyrtsac
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  4. L. Ghimpu
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Corresponding author

Correspondence to E. E. Harea .

Editor information

Editors and Affiliations

  1. Department of Physics, University of Chemical Technology and Metallurgy, Sofia, Bulgaria

    Plamen Petkov

  2. Department of Physics, Technical University of Moldova, Chisinau, Moldova

    Dumitru Tsiulyanu

  3. Dept. of Mathematics and Natural Sciences, University of Kassel, Kassel, Germany

    Wilhelm Kulisch

  4. Inst. of Nanostructure Technologies and Analytics, University of Kassel, Kassel, Germany

    Cyril Popov

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Harea, E.E., Aifantis, K.E., Pyrtsac, K.M., Ghimpu, L. (2015). Cyclic Nanoindentation for Examination of the Piezoresistivity and the Strain-Sensor Behavior of Indium-Tin-Oxide Thin Films. In: Petkov, P., Tsiulyanu, D., Kulisch, W., Popov, C. (eds) Nanoscience Advances in CBRN Agents Detection, Information and Energy Security. NATO Science for Peace and Security Series A: Chemistry and Biology. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-9697-2_5

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