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Thermal Effects on TSV Signal Integrity

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Abstract

In this chapter, we propose temperature dependent TSV isolation model and the result is applied to the channel model. The thermal effect on through-silicon via (TSV) noise coupling and S21 of TSV channel were measured in both frequency and time domain from corresponding TSV based test vehicle. These measurement results are analyzed using the temperature-dependent TSV lumped model to TSV channel and shows good correlation with measurement. Under the hundreds-of-MHz frequency range, increasing temperature decreases the S21 of TSV channel, but over that frequency range, increasing temperature increases the S21. These phenomena are explained from the model which thermal dependence of the materials is applied.

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Correspondence to Manho Lee .

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© 2014 Springer Science+Business Media Dordrecht

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Lee, M., Pak, J.S., Kim, J. (2014). Thermal Effects on TSV Signal Integrity. In: Lee, M., Pak, J., Kim, J. (eds) Electrical Design of Through Silicon Via. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-9038-3_5

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  • DOI: https://doi.org/10.1007/978-94-017-9038-3_5

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-017-9037-6

  • Online ISBN: 978-94-017-9038-3

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