Abstract
This chapter explains TSV noise coupling, which is one of the significant problems in TSV-based 3DIC. TSV shows frequency-dependent noise coupling characteristics, which can be analyzed based on the TSV and silicon substrate models. The noise coupling from TSV to TSVs and transistors is severe and coupling reduction methods are essential to satisfy very tight noise tolerance budget of current high performance 3DIC; control TSV design parameters and TSV array formation, optimize TSV termination scheme, as well as design shielding structures inside TSV array using high doped guard rings, shielding TSV, shielding bump. These methods are compared by showing shielding effectiveness, design restriction, consuming area, and manufacturing process compatibility and the several design guides are provided for choosing the adequate and best way among TSV noise coupling reduction methods considering real products.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Hall SH, Hall GW, McCall JA (2000) High-speed digital system design. Wiley-IEEE Press, New York
Afzali-Kusha A, Nagata M, Verghese NK, Allstot DJ (2006) Substrate noise coupling in SoC design: modeling, avoidance, and validation. Proc IEEE 94(12):2109–2138
Leferink FBJ (1995) Inductance calculations; methods and equations. In: IEEE proceedings symposium on electromagnetic compatibility, pp 16–22, Aug 1995
Yue CP, Wong SS (2000) Physical modeling of spiral inductors on silicon. IEEE Trans Electron Devices 47(3):560–568
Cho J, Song E, Yoon K, Pak JS, Kim J, Lee W, Song T, Kim K, Lee J, Lee H, Park K, Yang S, Suh M, Byun K, Kim J (2011) Modeling and analysis of through-silicon via (TSV) noise coupling and suppression using a guard ring. IEEE Trans Compon Packag Manuf Technol (CPMT) 1(2):220–244
Hermanowski J (2009) Thin wafer handling—Study of temporary wafer bonding materials and processes, 3DIC 2009. In: IEEE International conference on 3D system integration, 28–30 Sept 2009
Christopoulos C (1995) The transmission-line modeling method: TLM. IEEE Press and Oxford University Press, New York
Liu C, Song T, Cho J, Kim J, Kim J, Lim S (2011) Full-chip TSV-to-TSV coupling analysis and optimization in 3D IC. In: 2011 48th ACM/EDAC/IEEE design automation conference (DAC), 5–9 June 2011
Kim N, Wu D, Kim D, Rahman A, Wu P (2011) Interposer design optimization for high frequency signal transmission in passive and active interposer using through silicon via (TSV). In: 2011 IEEE 61st electronic components and technology conference (ECTC), 31 May–3 June 2011
Jan C, Agostinelli M, Deshpande H, El-Tanani MA, Hafez W, Jalan U, Janbay L, Kang M, Lakdawala H, Lin J, Lu Y, Mudanai S, Park J, Rahman A, Rizk J, Shin W, Soumyanath K, Tashiro H, Tsai C, Vandervoorn P, Yeh J, Bai P (2010) RF CMOS technology scaling in high-k/metal gate era for RF SoC (system-on-chip) applications. In: 2010 IEEE international electron devices meeting (IEDM), 6–8 Dec 2010
Cho J, Kim J, Pak JS, Lee J, Lee H, Park K, Kim J (2011) Noise coupling and shielding in through-silicon via (TSV)-based 3D IC. In: IEEE Asia-Pacific symposium on electromagnetic compatibility (APEMC), May 2011
Ryu S, Lu K, Jiang T, Im J, Huang R, Ho PS (2012) Effect of thermal stresses on carrier mobility and keep-out zone around through-silicon vias for 3-D integration. IEEE Trans Device Mater Reliab 12(2): 255, 262
Kim K, Hwang C, Koo K, Cho J, Kim H, Kim J, Lee J, Lee H, Park K, Pak JS (2012) Modeling and analysis of a power distribution network in TSV-based 3-D memory IC including P/G TSVs, on-chip decoupling capacitors, and silicon substrate effects. IEEE Trans Compon Packag Manuf Technol 2(12): 2057, 2070
Helmy A, Ismail M (2006) The chip-A design guide for reducing substrate noise coupling in RF Applications. IEEE Circuits Devices Mag 22(5): 7–21
Neamen DA (2003) Semiconductor physics and devices basic principles. McGraw-Hill, New York
Cho J, Kim J, Song T, Pak JS, Lee J, Lee H, Park K, Kim J (2010) Through silicon via (TSV) shielding structures. IEEE electrical performance of electronic packaging and systems (EPEPS), pp 269–272, 25–27 Oct 2010
Cho J, Yoon K, Pak JS, Kim J, Lee J, Lee H, Park K, Kim J (2010) Guard ring effect for through silicon via (TSV) noise coupling reduction. In: IEEE components, packaging and manufacturing technology society (CPMT) symposium Japan, 24–26 Aug 2010
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
Cho, J., Pak, J.S., Kim, J. (2014). Noise Coupling and Shielding in 3D ICs. In: Lee, M., Pak, J., Kim, J. (eds) Electrical Design of Through Silicon Via. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-9038-3_4
Download citation
DOI: https://doi.org/10.1007/978-94-017-9038-3_4
Published:
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-017-9037-6
Online ISBN: 978-94-017-9038-3
eBook Packages: EngineeringEngineering (R0)