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Modeling and Analysis of Spray Pyrolysis Deposited SnO2 Films for Gas Sensors

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Transactions on Engineering Technologies

Abstract

Metal oxide materials such as tin oxide (SnO2) show powerful gas sensing capabilities. Recently, the deposition of a thin tin oxide film at the backend of a CMOS processing sequence has enabled the manufacture of modern gas sensors. Among several potential deposition methods for SnO2, spray pyrolysis deposition has proven itself to be relatively easy to use and cost effective while providing excellent surface coverage on step structures and etched holes. A model for spray pyrolysis deposition using a pressure atomizer is presented and implemented in a Level Set framework. A simulation of tin oxide deposition is performed on a typical gas sensor geometry and the resulting structure is imported into a finite element tool in order to analyze the electrical characteristics and thermo-mechanical stress present in the grown layer after processing. The deposition is performed at 400 °C and the subsequent cooling to room temperatures causes a stress to develop at the material interfaces due to variations in the coefficient of thermal expansion between the different materials.

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Acknowledgements

This work has been partly performed in the COCOA-CATRENE European project and in the project ESiP. In this latter the Austrian partners are funded by the Austrian Research Promotion Agency (FFG) under project no. 824954 and the ENIAC Joint Undertaking.

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Authors and Affiliations

  1. Institute for Microelectronics, Technische Universität Wien, Gußhausstraße 27–29/E360, A–1040, Wien, Austria

    Lado Filipovic & Siegfried Selberherr

  2. Molecular Diagnostics, Health and Environment, AIT GmbH, Donau-City-Straße 1, A–1220, Wien, Austria

    Giorgio C. Mutinati, Elise Brunet, Stephan Steinhauer & Anton Köck

  3. ams AG, Tobelbaderstraße 30, A–8141, Unterpremstätten, Austria

    Jordi Teva, Jochen Kraft, Jörg Siegert & Franz Schrank

  4. Institute for Electron Microscopy and Fine Structure Research, Graz University of Technology and the Centre for Electron Microscopy Graz, Steyrergasse 17, A–8010, Graz, Austria

    Christian Gspan & Werner Grogger

Authors
  1. Lado Filipovic
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  2. Siegfried Selberherr
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  3. Giorgio C. Mutinati
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  4. Elise Brunet
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  5. Stephan Steinhauer
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  6. Anton Köck
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  7. Jordi Teva
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  10. Franz Schrank
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  11. Christian Gspan
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  12. Werner Grogger
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Corresponding author

Correspondence to Lado Filipovic .

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Editors and Affiliations

  1. Department of Multimedia Engineering, College of Engineering, Mokpo National University, Mokpo, Jeonnam, Korea, Republic of (South Korea)

    Gi-Chul Yang

  2. Unit 1, 1/F IAENG Secretariat, International Association of Engine, Hong Kong, Hong Kong SAR

    Sio-Iong Ao

  3. Department of Applied Mathematics and Computing, Cranfield University, Cranfield, Bedfordshire, United Kingdom

    Len Gelman

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Filipovic, L. et al. (2014). Modeling and Analysis of Spray Pyrolysis Deposited SnO2 Films for Gas Sensors. In: Yang, GC., Ao, SI., Gelman, L. (eds) Transactions on Engineering Technologies. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-8832-8_22

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  • DOI: https://doi.org/10.1007/978-94-017-8832-8_22

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-017-8831-1

  • Online ISBN: 978-94-017-8832-8

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