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Let Us Switch to Scanning Transmission Electron Microscopy

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Analytical Transmission Electron Microscopy

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Abstract

For analytical investigations in the transmission electron microscope (TEM) a nanoscaled illuminated (i.e. excited) area is wanted to maintain a high spatial resolution. The electron optics of the illumination system within a TEM (condenser system and a part of the objective field in front of the specimen) is able to focus very small electron probes with sizes down to the 0.1 nm range on the specimen plane. Deflection units allow to scan this small electron probe on the sample analogous to the method known from the conventional scanning electron microscope. Similar to the name “transmission electron microscope (or microscopy)—TEM” an abbreviation of the method is common practice: STEM. It stands for “scanning transmission electron microscope” or “scanning transmission electron microscopy”.

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Notes

  1. 1.

    The fundamental idea of the scanning electron microscope was published by M. von Ardenne in 1938 [1]. The STEM variant including the field emission gun was suggested by A. Crewe in 1968 [2]. Overview about STEM developments, see S. J. Pennycook [3].

  2. 2.

    O.L. Krivanek et al. introduced a CS-corrector especially for a “dedicated STEM” without any TEM part [4].

  3. 3.

    Vasco Ronchi, Italian physicist (optics), 1897–1988.

References

  1. von Ardenne, M.: Das Elektronen-Rastermikroskop. Theoretische Grundlagen. Z. Physik. 109(9–10), 553–572 (1938)

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  2. Crewe, A.V., Wall, J., Welter, L.M.: A high-resolution scanning transmission electron microscope. J. Appl. Phys. 39(13), 5861–5868 (1968)

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  3. Pennycook, S.J.: Seeing the atoms more clearly: STEM imaging from the Crewe era to today. Ultramicroscopy 123, 28–37 (2012)

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  4. Krivanek, O.L., Dellby, N., Lupimi, A.R.: Towards sub-Å electron beams. Ultramicroscopy 78, 1–11 (1999)

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  5. Joy, D. C.: Monte Carlo Modeling for Electron Microscopy and Microanalysis. Oxford University Press, New York (1995)

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Authors and Affiliations

  1. Leibniz Institute for Solid State and Materials Research (IFW), Dresden, Germany

    Jürgen Thomas & Thomas Gemming

Authors
  1. Jürgen Thomas
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  2. Thomas Gemming
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Correspondence to Jürgen Thomas .

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Thomas, J., Gemming, T. (2014). Let Us Switch to Scanning Transmission Electron Microscopy. In: Analytical Transmission Electron Microscopy. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-8601-0_8

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