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Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 60))

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Abstract

In Chap. 9, the generation of CNPs was experimentally confirmed without exceptions in all atmospheric CVD processes that were tested.

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Correspondence to Nong Moon Hwang .

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Hwang, N.M. (2016). Experimental Confirmation of Charged Nanoparticles at Low Pressure. In: Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes. Springer Series in Surface Sciences, vol 60. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-7616-5_10

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