Abstract
The fabrication of polymer based microfluidc systems requires a complex technology chain with process steps significantly different from systems based on silicon or glass. In this paper we present the fabrication technology based on polymer replication techniques, which offer the potential for low-cost high volume manufacturing of μ-TAS devices.
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Becker, H., Rötting, O., Röpke, W., Heim, U. (2000). Technology chain for polymer μ-TAS applications. In: van den Berg, A., Olthuis, W., Bergveld, P. (eds) Micro Total Analysis Systems 2000. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-2264-3_35
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DOI: https://doi.org/10.1007/978-94-017-2264-3_35
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-5496-8
Online ISBN: 978-94-017-2264-3
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