Abstract
The main achievement presented in this paper is the use of a new non-lithographic technique for the patterning of antibodies-linking surfaces, on defined areas of biomicrosystems (BioMEMS). This new technique, called shadow mask technique permits high ratio of biomolecules-linking, as it avoids any photolithography resist pollution of the activated surfaces. Moreover it is compatible with microelectronics techniques, and permits thus very precise alignment with the other layers (microelectrodes, microcapillaries) of the bioMEMS.
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© 2000 Springer Science+Business Media Dordrecht
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Tixier, A. et al. (2000). Realisation of a Cell Manipulation Bio-Microsystem using Shadow mask techniques. In: van den Berg, A., Olthuis, W., Bergveld, P. (eds) Micro Total Analysis Systems 2000. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-2264-3_28
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DOI: https://doi.org/10.1007/978-94-017-2264-3_28
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-5496-8
Online ISBN: 978-94-017-2264-3
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