Abstract
Photoacoustic spectroscopy is a useful technique for monitoring chemical composition in integrated analysis systems since the detection limit scales favorably with miniaturization. The technique is demonstrated with a photoacoustic cell made in brass and integrated with a microfabricated chemical reactor, which uses a diode and a hearing aid microphone to detect propane in carbon dioxide. A microfabricated photoacoustic detection cell is also shown that uses laser excitation brought into the cell by an optical fiber.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
J. Han, “Fabry-Perot Cavity Chemical Sensors by Silicon Micromachining Techniques,” Appl. Phys. Lett., vol. 74, pp. 445–447, 1999.
S. D. Collins et al.,“Fourier-transform optical microsystems,” Opt. Lett.,vol. 24, pp. 844–846,1999.
W. H. Weinberg et al.,“Combinatorial Methods in Homogeneous and Heterogeneous Catalysis,” Curr. Opin. Solid State and Mat. Sci.,vol. 3, pp. 104–110, 1998.
R. Srinivasan et al.,“Micromachined Reactors for catalytic Partial Oxidation Reactions,” AIChE J.,vol. 43, pp. 3059–3069, 1997.
L. B. Kreuzer, “Ultralow Gas Concentration Infrared Absorption Spectroscopy,” J. Appl. Phys., vol. 42, pp. 2934–2943, 1971.
P. R. Scheeper et al.,“A Review of Silicon Microphones,” Sens. and Act. A,vol. 44, pp. 1–11, 1994.
J.-B. Chévrier et al.,“An Infrared Pneumatic Detector Made by Micromachining Technology,” J. Micromech. and Microeng.,vol. 5, pp. 193–195, 1995.
K. Yamashita et al.,“Miniaturized Infrared Sensor Using Silicon Diaphragm Based on Golay Cell,” Sens. & Act. A,vol. A66, pp. 29–32, 1998.
U. Bonne et al.,“Micromachined Integrated Opto-Flow Gas/Liquid Sensor,” US Pat. 5886249, 1999.
L. B. Kreuzer, “The Physics of Signal Generation and Detection,” in Optoacoustic Spectroscopy and Detection, Y.-H. Pao, Ed. London: Academic Press Inc., 1977, pp. 1–25.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2000 Springer Science+Business Media Dordrecht
About this paper
Cite this paper
Firebaugh, S.L., Jensen, K.F., Schmidt, M.A. (2000). Miniaturization and Integration of Photoacoustic Detection with a Microfabricated Chemical Reactor System. In: van den Berg, A., Olthuis, W., Bergveld, P. (eds) Micro Total Analysis Systems 2000. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-2264-3_10
Download citation
DOI: https://doi.org/10.1007/978-94-017-2264-3_10
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-5496-8
Online ISBN: 978-94-017-2264-3
eBook Packages: Springer Book Archive