Abstract
In certain low pressure plasmas, the Non-Local Approximation (NLA) can simplify the solution of the Holtzman equation by describing the electron distribution function (EDF) as being spatially uniform in terms of total electron energy[1]. However, the NLA is limited to cases where the energy relaxation length is much larger than the discharge scale[2]. A “hybrid” approach uses the NLA to calculate the elastic part of the EDF and the space-dependent kinetic equation is used for the high energy part[3].
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References
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© 1999 Springer Science+Business Media Dordrecht
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Heil, B.G., Kortshagen, U. (1999). Two-Dimensional Mapping of the Electron Energy Distribution Function. In: Schlüter, H., Shivarova, A. (eds) Advanced Technologies Based on Wave and Beam Generated Plasmas. NATO ASI Series, vol 67. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-0633-9_49
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DOI: https://doi.org/10.1007/978-94-017-0633-9_49
Publisher Name: Springer, Dordrecht
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