Abstract
Advances in the development of high T, superconducting, diamond like carbon (DLC) and ferroelectric thin films and components and devices for electronics have led to the optimalization of patterning techniques. The laser patterning has a number of advantages over the other techniques. This technique is high perspective because a laser beam can cause various processes in this materials such as melting, ablation, evaporation and modification. The superconducting structures are suitable specially for subsequent studies of superconducting phenomena [1] and electronics device production (superconducting resonators, filters, AD and DA converters and SQUIDs [2],[3],[4]). The DLC film structures are suitable for infrared optics, resists and micromechanical devices [5],[6].
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© 1996 Springer Science+Business Media Dordrecht
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Lančok, J., Jelínek, M., Trtík, V., Jastrabík, L. (1996). Laser Patterning of Thin Films. In: Kossowsky, R., Jelinek, M., Walter, R.F. (eds) High Power Lasers — Science and Engineering. NATO ASI Series, vol 7. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8725-9_37
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DOI: https://doi.org/10.1007/978-94-015-8725-9_37
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