Abstract
Sputtering by means of the inverted cylindrical magnetron and other techniques allows thin films of the “1-2-3” phase to be produced in high growth quality and with excellent superconducting properties. By this process, superconducting ultra-thin films of only two unit cells thickness can be deposited, which allows multilayers to be manufactured. Variations in the deposition parameters can be used to influence the growth directions of the layers, thus permitting three-dimensional patterning of electronic devices. Epitaxially grown intermediate films permit the use of application-related substrates. Knowledge of the growth of layers in the film plane, and its manipulation, is used to design electronic devices. Also a number of other oxide superconductors can be prepared as thin films with good properties.
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© 1995 Springer Science+Business Media Dordrecht
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Geerk, J., Linker, G., Meyer, O. (1995). Thin Films of High-Temperature Superconductors: Application-Oriented Studies of Growth and Properties. In: Misaelides, P. (eds) Application of Particle and Laser Beams in Materials Technology. NATO ASI Series, vol 283. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8459-3_6
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DOI: https://doi.org/10.1007/978-94-015-8459-3_6
Publisher Name: Springer, Dordrecht
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