Abstract
The fundamentals of High Energy Ion Scattering (possibly combined with channelling) are discussed in relation to the accuracy required for materials science studies and in relation to characteristics of competing surface analysis techniques. The extreme versatility of ion scattering techniques is demonstrated by a survey through many application areas in materials science, ranging from plastics to oxydic insulators, semiconductors and metals.
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van Ijzendoorn, L.J. (1995). Applications of High Energy Ion Scattering in Materials Science. In: Misaelides, P. (eds) Application of Particle and Laser Beams in Materials Technology. NATO ASI Series, vol 283. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8459-3_21
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DOI: https://doi.org/10.1007/978-94-015-8459-3_21
Publisher Name: Springer, Dordrecht
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