Abstract
For more than ten years now, the development of nanometric scale structures, such as deposited layers, multilayers..., has been very important in modern industry. Because of their potential technological applications in coating and semiconductor technology, they are investigated in different fields of physics for their optical, magnetic, electrical or superconducting properties. In this context, new techniques have been developed to get accurate measurements of the structures on an atomic and medium-range scale. These new techniques need surface sensitivity with small penetration depths. We can list some of the more commonly used: secondary ion mass spectroscopy (SIMS), X-ray photoelectron spectroscopy (XPS), Rutherford back scattering (RBS), reflection high-energy electron diffraction (RHEED), conversion electron extended X-ray fine structure (CEEXAFS), transmission electron microscopy, (TEM), grazing-incidence diffraction (GID), grazing-incidence fluorescence (GIF), X-ray reflectometry and finally grazing-incidence small-angle X-ray scattering (GISAXS).
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Naudon, A. (1995). Grazing-Incidence Small-Angle X-Ray Scattering, Application to Layers and Surface Layers. In: Brumberger, H. (eds) Modern Aspects of Small-Angle Scattering. Nato ASI Series, vol 451. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8457-9_5
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DOI: https://doi.org/10.1007/978-94-015-8457-9_5
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