Abstract
Using two-dimensional laser surface processing, various surface modifications have already been demonstrated. In this paper, possibilities of producing three-dimensional structures are discussed, presenting two experimental examples for three-dimensional laser chemical vapor deposition. In the second part, results about the photochemical excimer laser induced chemical vapor deposition of aluminum from amine alane precursors are presented.
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Reference
T. W. Sigmon, Mat. Res. Soc. Proc. 75, 619 (1987)
G. Leyendecker, D. Bäuerle, P. Geittner, H. Lydtin, Appl. Phys. Lett. 39, 921 (1981)
D. Bäuerle, G. Levendecker, D. Wagner, E. Bauser, Y. C. Lu, Appl. Phys. A 30, 147 (1983)
M. Boman, H. Westberg, S. Johansson, J.-A. Schweitz, Proceedings of IEEE Workshop on Micro Electro Mechanical Systems, Travemünde 1992, S. 162
O. Lehmann, M. Stuke, Appl. Phys. A 61, 2027 (1991)
T. H. Baum, C. E. Larson, R. L. Jackson, Appl. Phys. Lett. 55, 1264 (1989).
O. Gottsleben, H.W. Roesky, M. Stuke, Adv. Mat. 3, 201 (1991).
see, for example D. S. Wu, Laser Focus World, November 1990
T. M. Bloomstein, D. J. Ehrlich, Appl. Phys. Lett. 61, 708 (1992)
J. H. Strickler, W. W. Webb,. Adv. Mater. 5, 479 (1993)
J. Y. Tsao, D. J. Ehrlich,. Appl. Phys. Lett. 45, 617 (1984)
M. L. Green, R. A. Levy, R.G. Nuzzo, E. Coleman, Thin Solid Films 114, 367 (1984)
G. S. Higashi, C. G. Fleming, Appl. Phys. Lett. 48, 1051 (1986)
G. S. Higashi, G. E. Blonder, C. G. Fleming, Mater. Res. Soc. Symp. Proc. 75, 117 (1987)
T. Cacouris, G. Scelsi, P. Shaw, R. Scarmozzino, R. M. Osgood, R. R. Krchnavek, Appl. Phys. Lett. 52, 1865 (1988).
M. Hanabusa, A. Oikawa, P. Y. Cai, J. Appl. Phys. 56, 3268 (1989)
M. Hanabusa, M. Ikeda, Mater. Res. Soc. SvmD. Proc. 158, 135 (1990)
T. H. Baum, C. E. Larson, R. L. Jackson, Appl. Phys. Lett. 55, 1264 (1989)
W. L. Gladfelter, D. C. Boyd, K. F. Jensen, Chem. Mater. 1, 339 (1989)
D. B. Beach, S. E. Blum, F. K. LeGoues, J. Vac. Sci. Technol. A 7, 3117 (1989)
M. E. Gross, K. P. Cheung, C. G. Fleming, J. Kovalchick, L. A. Heimbrook, J. Vac. Sci. Technol. A 9, 57 (1991)
L. H. Dubois, B. R. Zegarski, C. Kao, R. G. Nuzzo, Surf. Sci. 236, 77 (1990)
M. E. Gross, L. R. Harriot R. L. Opila, J. Appl. Phvs. 68. 4820 (1990)
M. E. Gross, C. G. Fleming, K. P. Cheung, L. A. Heimbrook, J. Appl. Phys. 69, 2589 (1991)
M. G. Simmonds, W. L. Gladfelter, R. Nagaraja, W. W. Szymanski, K.-H. Ahn, P. H. McMurry, J. Vac. Sci. Technol A 9 2782 (1991)
M. G. Simmonds, E. C. Phillips, J. -W. Hwang, W. L. Gladfelter. Chemtronics 5, 155 (1991)
F. Foulon, M. Stuke, Appl. Phys. A 56, 267 (1993)
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© 1994 Springer Science+Business Media Dordrecht
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Lehmann, O., Foulon, F., Stuke, M. (1994). Surface and Three-Dimensional Processing by Laser Chemical Vapor Deposition. In: Laude, L.D. (eds) Excimer Lasers. NATO ASI Series, vol 265. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8104-2_7
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DOI: https://doi.org/10.1007/978-94-015-8104-2_7
Publisher Name: Springer, Dordrecht
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