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Excimer Laser Beam Interaction with Metals and Ceramics Part I: Fundamental Aspects

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Excimer Lasers

Part of the book series: NATO ASI Series ((NSSE,volume 265))

Abstract

In the present paper the results obtained from high speed process diagnostics (short time photography, plasma emission spectroscopy and fast Schlieren photography) are used to characterize the beam material interaction and the dynamic of the resultant process. Key variables are the fluence, the surrounding atmosphere and the properties of the illuminated material. Based on the fundamental description of the occurring process phenomena technological applications can be deduced, which are described in part II of this paper (technological aspects, this volume).

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References

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© 1994 Springer Science+Business Media Dordrecht

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Schutte, K., Bergmann, H.W. (1994). Excimer Laser Beam Interaction with Metals and Ceramics Part I: Fundamental Aspects. In: Laude, L.D. (eds) Excimer Lasers. NATO ASI Series, vol 265. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8104-2_23

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  • DOI: https://doi.org/10.1007/978-94-015-8104-2_23

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-4395-5

  • Online ISBN: 978-94-015-8104-2

  • eBook Packages: Springer Book Archive

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