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Excimer Lasers pp 339–353Cite as

Soft X-Ray Radiation from Excimer-Driven Laser-Plasma Sources: Application to Submicron Lithography

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Part of the book series: NATO ASI Series ((NSSE,volume 265))

Abstract

Radiative characteristics of laser-plasma soft x-ray sources are reviewed. The dependence of the main plasma parameters on the heating laser wavelength is discussed, as well as the use of application-specific excimer lasers. A comparison is given with other soft x-ray sources like electron storage rings. Examples of the application of normal-incidence multilayer x-ray optics, e.g. to collimate the laser-plasma radiation or for soft x-ray projection lithography, are given.

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References

  1. E. Müller-Horsche, P. Oesterlin, D. Basting, Recent progress towards multi-kilowatt output, ECO4 Conf. Proc. (1991)

    Google Scholar 

  2. R. Sigel, X-rays from laser produced plasmas, SPIE Conf. Proc. 1140 (1989) 6–12

    Article  CAS  Google Scholar 

  3. F. O’Neill, Laser plasma XUIV sources, in Laser-plasma interactions 4, Ed. M.B. Hooper, Proc. 35th Scottish Universities Summer School in Physics, (1988) 285–315

    Google Scholar 

  4. A.V. Vinogradov, V. N. Shlyaptsev, Characteristics of laser plasma x-ray source, Sov. J. Quant. Electr. 171 (1987) 5–26

    Google Scholar 

  5. W.C. Mead, E.M. Campbell, K.G. Estabrook, R.E. Turner, W.L. Kruer, P.H.Y. Lee, B. Pruet, V.C. Rupert, K.G. Tirsell, G.L. Stradling, F. Ze, Laser-plasma interaction at 0.53 µmn for disk targets of varying Z. Phys. Rev. Lett. 47 18 (1981) 1289–1292

    Article  CAS  Google Scholar 

  6. P.K. Carroll, E.T. Kennedy, G. O’Sullivan, Laser produced continua for absorption spectroscopy in the VUV and XUV, Appl. Opt, 19 9 (1980) 1454–1462

    Article  CAS  Google Scholar 

  7. T. Mochizuki, T. Yabe, K. Okada, M. Hamada, N. Ikeda, S. Kiyokawa, and C. Yamanaka, Atomic number dependence of soft x-ray emission from various targets irradiated by 0.53 µm wavelength laser, Phys. Rev. A33 1 (1986) 525–539

    Article  CAS  Google Scholar 

  8. M.D. Rosen, D.W. Philion, V.C. Rupert, W.C. Mead, W.L. Kruer, J.J. Thomson, H.N. Kornblum, V.W. Slivinsky, G.J. Caporaso, M.J. Boyle, and K.G. Tirsell, Interaction of 1.06µun laser radiation with high Z targets, Phys. Fluids 22 10 (1979) 2020–2031

    Article  CAS  Google Scholar 

  9. J. Fischer, M. Kühne, B. Wende, Spectral radiant power measurements of VLIV and soft xray sources using electron-storage ring Bessy as a radiometric standard source, Appl. Opt. 23 23 (1984) 4252–4260

    Article  CAS  Google Scholar 

  10. H. Nishimura, F. Matsuoka, M. Yagi, K. Yamada, S. Nakai, G.H. McCall, and C. Yamanaka, Radiation conversion and related ablation behaviour of a gold-foil target irradiated by 0.35, 0.53, 1.06, and 10.6 µm lasers, Phys. Fluids. 26 6 (1983) 1688–1692

    Article  CAS  Google Scholar 

  11. H. C. Gerritsen, H. van Brug, F, Bijkerk, M.J. van der Wiel, Laser generated plasma as soft x-ray source, J. Appl. Phys. 59 7 (1986) 2337–2344

    Article  CAS  Google Scholar 

  12. K. Eidmann, T. Kishimoto, Absolutely measured x-ray spectra from laser plasmas with targets of differentferent elements, Appl. Phys. Lett. 49 7 (1986) 377–378

    Article  CAS  Google Scholar 

  13. F. O’Neill, I.C.E. Turcu, D. Xenakis, M.H.R. Hutchinson, X-ray emission from plasmas generated by an XeCl laser picosecond pulse train, Appl. Phys. Lett. 55 25 (1989) 2603–2604

    Article  Google Scholar 

  14. K. Eidmann, W. Schwanda, Conversion of laser light into soft x-rays with 3 ns and 30 ps laser pulses, Lasers and Particle Beams (1991)

    Google Scholar 

  15. W.C. Mead, E.M. Campbell, K.G. Estabrook, R.E. Turner, W.L. Kruer, P.H.Y. Lee, B. Pruet, V.C. Rupert, K.G. Tirsell, G.L. Stradling, F. Ze, C.E. Max, M.D. Rosen, and B.L. Lasinski, Laser-plasma irradiation of disk targets at 0.53 µm wavelength, Phys. Fluids 26 8 (1983) 2316–2331

    Article  CAS  Google Scholar 

  16. K.M. Glibert, J.P. Anthes, M.A. Gusinow, M.A. Palmer, R.R. Whitlock, D.J. Nagel, X-ray yields of plasma heated by 8 ns neodynium laser pulses, J. Appl. Phys. 51 3 (1980) 1449–1451

    Article  Google Scholar 

  17. R. Kodama, K. Okada, N. Ikeda, M. Mineo, K.A. Tanaka, T. Mochizuki, and C. Yamanaka, Soft x-ray emission from ω0, 2ω0, and 4ω0 laser-produced plasmas, J. Appl. Phys. 59 9 (1986) 3050

    Article  CAS  Google Scholar 

  18. G.D. Kubiak, XUV resist characterization, studies with a laser plasma source, Proc. SPIE 1343 (1990) 283–291

    Article  Google Scholar 

  19. G.M. Davis. M.C. Gower, F. O’Neill, and I.C.E. Turcu, Plasma x-ray source for lithography generated by a ~30 J, 30 ns KrF laser, Appl. Phys. Lett. 53 17 (1988) 1583–1585

    Article  CAS  Google Scholar 

  20. F. O’Neill, I.C.E. Turcu, D. Xenakis, and M.H.R. Hutchinson, X-ray emission from plasmas generated by an XeCl laser picosecond pulse train, Appl. Phys. Lett. 55 25 (1989) 2603–2604

    Article  Google Scholar 

  21. A. Tünnermann, K. Wrede, and B. Wellegehausen, Generation of high peak power excimer laser radiation by pulse shortening, Appl. Phys. B 50 (1990) 361–364

    Article  Google Scholar 

  22. F. Bijkerk, G.E. van Dorssen and M.J. van der Wiel, Laser plasma as x-ray source for lithographic imaging of submicron structures onto experimental x-ray resist, Microelectr. Eng. 9 (1989) 121–126

    Article  CAS  Google Scholar 

  23. California Jamar Inc., San Diego, Ca, USA

    Google Scholar 

  24. D.E. Andrews, M.N. Wilson, A.I. Smith, V.C. Kempson, A.L. Purvis, R.J. Andersen, A.S. Bhutta, A.R. Jorden, Helios, a compact superconducting x-ray source for production lithography, SPIE Conf Proc. 1263 (1990)

    Google Scholar 

  25. S. Krinsky, Experience with synchrotron radiation sources, in: X-ray microscopy II, Springer Series 56 (1987) 4–9

    Google Scholar 

  26. M. Kühne, B. Wende, Vacuum UIV and soft x-ray radiometry, J. Phys. E. 18 (1986) 637–647

    Article  Google Scholar 

  27. F. Richter, J. Eberle, R. Holz, W. Neff, R. Lebert, Repetitive plasma focus as radiation source for X-ray lithography, 2nd Int. Conf. High Density Pinches, Laguna Beach, Conf. Proc. (1989)

    Google Scholar 

  28. J. Feldhaus, Soft x-ray monochromators for synchrotron radiation, SPIE Conf. Proc. 984 (1988) 11–22

    Article  CAS  Google Scholar 

  29. F. Bijkerk, E. Louis, A.P. Shevelko, A.A. Vasilyev, Absolute brightness of laser plasmas in the soft x-ray emission band, submitted to Applied Optics

    Google Scholar 

  30. R.R. Freeman, L.D. van Woerkom, T.J. Mcllrath, W.E. Cooke, Non-linear interaction of visible light and x-rays, measurement of femtosecond duration soft x-ray pulses, to be published

    Google Scholar 

  31. N.M. Ceglio, Revolution in x-ray optics, J. X-ray Sc. and Technol. 1 (1989) 7–78

    Article  CAS  Google Scholar 

  32. M.P. Bruijn, J. Verhoeven, E. Puik, M.J. van der Wiel, Multilayer x-ray mirrors: the state of the art, SPIE Conf. Proc. 984 (1988) 54–63

    Article  CAS  Google Scholar 

  33. D.L. Spears, H.I. Smith, Electron. Lett. 8 102 (1972),

    Article  Google Scholar 

  34. D.L. Spears, H.I. Smith, and Solid State Technol. 15 21 (1972)

    Article  Google Scholar 

  35. Hawryluk, Seppala, J. Vac. Sc.

    Google Scholar 

  36. Multilayer mirrors exhibit a spectral selectivity λ1Δγ equal to the number of layer pairs effectively contributing to the reflected signal.

    Google Scholar 

  37. V.L. Artsimovich, S.V. Gaponov, Yu.S. Kas’yanov, B.M. Luskin, N.N. Salashchenko, I.I. Sobelman, A.P. Shevelko, Formation of directed intense vacuum ultra-violet radiation from a laser plasma, JETP Lett., 46 8 (1987) 391–394

    Google Scholar 

  38. S.V. Gaponov, S.A. Gusev, V.V. Dubreov, A.I. Kuzmichev, B.M. Luskin, N.N. Salashchenko, A.P. Shevelko, V.A. Slemzin, I.I Sobelman, and I.G. Zabrodin, Normal incidence multilayer mirrors for the 120–450A wavelength region, J. of X-ray Sc. & Technol. 2 (1990) 241–248

    Article  CAS  Google Scholar 

  39. H.J. Voorma, F. Bijkerk, Design of an extended image field X UV telescope for projection lithography, Proc. Conf. Soft X-ray Projection Lithography, Monterey (1991)

    Google Scholar 

  40. N.M. Ceglio, D.P. Gaines, D.G. Stearns, A.M. Hawryluk, Double pass amplification of laser radiation at 131 Å, Opt. Comm. 69 (1989) 285–288

    Article  CAS  Google Scholar 

  41. D.L. Matthews, P.L. Hagelstein, M.D. Rosen, M.J. Eckart, N.M. Ceglio, A.U. Hazi, H. Medecki, B.J. MacGowan, J.E. Trebes, B.L. Whitten, E.M. Campbell, C.W. Hatcher, A.M. Hawryluk, R.L. Kauffman, L.D. Pleasance, G. Rambach, J.H. Scofield, G. Stone, and T.A. Weaver, Demonstration of soft x-ray amplifier, Phys. Rev. Lett. 54 2 (1985) 110–113

    Article  CAS  Google Scholar 

  42. S. Suckewer, C.H. Skinner, H. Milchberg, C. Keane, and D. Voorhees, Amplification of stimulated soft x-ray emission in a confined plasma column, Phys. Rev. Lett. 55 17 (1985) 1753–1756

    Article  CAS  Google Scholar 

  43. H. van Brug, F. Bijkerk, M.J. van der Wiel and B. van Wingerden, Low-Z element analysis by soft-x-ray line emission of a laser-produced plasma, J. Anal. At. Spectrom. 2 (1987) 503–507

    Article  Google Scholar 

  44. S.V. Bobashev, N.N. Salashchenko, L.A. Shmaenok, Absolute SXR radiometry technique for laser plasma sources, ECO4 Conf. Proc. (1991)

    Google Scholar 

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Author information

Authors and Affiliations

  1. FOM-Institute for Plasma Physics Rijnhuizen, Edisonbaan 14, 3439 MN, Nieuwegein, The Netherlands

    F. Bijkerk

  2. Lebedev Physical Institute, Russian Academy of Sciences, Leninsky Prospekt 53, Moscow, Russia

    A. P. Shevelko

Authors
  1. F. Bijkerk
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  2. A. P. Shevelko
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Editors and Affiliations

  1. Département des Matériaux et Procédés, Laboratoire de Physique de l’Etat Solide, Université de Mons-Hainaut, Mons, Belgium

    Lucien D. Laude

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Bijkerk, F., Shevelko, A.P. (1994). Soft X-Ray Radiation from Excimer-Driven Laser-Plasma Sources: Application to Submicron Lithography. In: Laude, L.D. (eds) Excimer Lasers. NATO ASI Series, vol 265. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8104-2_22

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  • DOI: https://doi.org/10.1007/978-94-015-8104-2_22

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-4395-5

  • Online ISBN: 978-94-015-8104-2

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