Applications of Lasers in Microelectronics and Micromechanics

Abstract

Vigorous research activity has been directed over the last few years to laser processing for microfabrication. The new techniques that have emerged are motivated by possibilities ranging from the achievement of a 0.15-µm optical lithography to development of entirely nonlithographic laser direct writing methods for circuit prototyping and postfabrication (final step) processing. The former technology is poised as a simpler, faster, and less expensive alternative to x-ray, electron, or ion-beam lithography for fabricating next generation VLSI. The latter would make methods available for interactive circuit design, multichip modules, and 3-D micromechanics.