Skip to main content
SpringerLink
Log in
Book cover

Excimer Lasers pp 1–13Cite as

Excimer Lasers: Current Status and Future Developments

  • Chapter

Part of the book series: NATO ASI Series ((NSSE,volume 265))

Abstract

Excimer lasers are the most important source for coherent UV radiation. This overview focuses on those characteristics features from which these lasers draw their potential for applications.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   259.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   329.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. S.K. Searles, G.A. Hart, Appl. Phys. Lett. 27, 243 (1975)

    Article  CAS  Google Scholar 

  2. R. Srinivasan, J. Vac. Sci. Technol. B1(4), 923 (1983)

    Article  CAS  Google Scholar 

  3. Ch. K. Rhodes (ed.), “Excimer Lasers”, Topics in Applied Physics Vol.30, Springer

    Google Scholar 

  4. Rev. of Laser Engineering 21 (1), 1993

    Google Scholar 

  5. F. Müller, K. Mann, P. Simon, J. Bernstein, Proc. of OELase’93, LA, SPIE Vol.1858

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Lambda Physik GmbH, Hans-Böckler-Str. 12, D-37079, Göttingen, Germany

    U. Rebhan, B. Nikolaus & D. Basting

Authors
  1. U. Rebhan
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. B. Nikolaus
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. D. Basting
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Département des Matériaux et Procédés, Laboratoire de Physique de l’Etat Solide, Université de Mons-Hainaut, Mons, Belgium

    Lucien D. Laude

Rights and permissions

Reprints and permissions

Copyright information

© 1994 Springer Science+Business Media Dordrecht

About this chapter

Cite this chapter

Rebhan, U., Nikolaus, B., Basting, D. (1994). Excimer Lasers: Current Status and Future Developments. In: Laude, L.D. (eds) Excimer Lasers. NATO ASI Series, vol 265. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8104-2_1

Download citation

  • DOI: https://doi.org/10.1007/978-94-015-8104-2_1

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-4395-5

  • Online ISBN: 978-94-015-8104-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation