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Fluid and Hybrid Models of Non Equilibrium Discharges

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Book cover Plasma Processing of Semiconductors

Part of the book series: NATO ASI Series ((NSSE,volume 336))

Abstract

In this paper we present a general discussion of fluid and hybrid models of non equilibrium discharge plasmas. We emphasize in particular the description of the charge particle — electric field submodel and do not consider the questions of plasma chemistry and plasma surface interaction. Assumptions implied by the fluid description, and some aspects of the numerical methods are discussed.

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Author information

Authors and Affiliations

  1. Centre de Physique des Plasmas et Applications de Toulouse, Université Paul Sabatier, 118 Route de Narbonne, 31062, Toulouse cedex, France

    J.-P. Boeuf & A. Merad

Authors
  1. J.-P. Boeuf
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  2. A. Merad
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Editors and Affiliations

  1. Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska, USA

    P. F. Williams

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© 1997 Springer Science+Business Media Dordrecht

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Boeuf, JP., Merad, A. (1997). Fluid and Hybrid Models of Non Equilibrium Discharges. In: Williams, P.F. (eds) Plasma Processing of Semiconductors. NATO ASI Series, vol 336. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5884-8_16

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  • DOI: https://doi.org/10.1007/978-94-011-5884-8_16

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6486-6

  • Online ISBN: 978-94-011-5884-8

  • eBook Packages: Springer Book Archive

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