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Part of the book series: NATO ASI Series ((ASHT,volume 26))

Abstract

Digital circuits based on High Temperature Superconductors (HTS) have the potential for offering operation at higher speed, and lower power dissipation than semiconductor circuits, while offering unprecedented performance advantages attributable to the unique quantum mechanical nature of the superconducting state. In order to fully realize this potential, it is necessary to develop a circuit process which integrates reproducible Josephson junctions into epitaxial multilayers. This paper discusses some of the materials and fabrication issues involved in the development of such a process.

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References

  1. Przybysz, J.X., Miller, D.L., Naviasky, E.H., and Kang, J. H. (1993) Josephson sigma-delta modulator for high dynamic range A/D conversion, IEEE Transactions on Applied Superconductivity 3 2732–2735.

    Article  Google Scholar 

  2. Miller, D.L., Przybysz, J.X., Meier, D.L., Kang, J.H., and Worsham, A.H. (1995) Characterization of a superconductive sigma-delta analog to digital converter, IEEE Transactions on Applied Superconductivity 5 2453–2456.

    Article  Google Scholar 

  3. Lin, J.C., Polonsky, S. V., Schneider, D.F., Semenov, V.K., Shevchenko, P.N., and Likharev, K.K. (1993) Development of sensitive SFQ-counting A/D converter, Extended abstracts of the 1993 International Superconductive Electronics Conference, Boulder CO, pp. 90–91.

    Google Scholar 

  4. Przybysz, J.X., Miller, D.L., Kang, J.H., Worsham, A.H., and Meier, D.L., Digital signal processing requirements for single flux quantum cells, Extended abstracts of the 1993 International Superconductive Electronics Conference, Boulder CO, pp. 108–109.

    Google Scholar 

  5. Herr, Q.P., Vukovic, N., Mancini, C.A., Gaj, K., Ke, Q., Adler, V., Friedman, E.G., Krasniewski, A., Bocko, M.F., and Feldman, M.J. (1996) Design and low speed testing of a four-bit RSFQ multiplier-accumulator, to be published in IEEE Transactions on Applied Superconductivity, June 1997.

    Google Scholar 

  6. Kaplan, S.B., Rylov, S.V., and Bradley, P.D. (1996) Real-time digital error correction for flash analog-to-digital converter, to be published in IEEE Transactions on Applied Superconductivity, June 1997.

    Google Scholar 

  7. Worsham, A.H., Przybysz, J.X., Kang, J.H., and Miller, D.L. (1995) A single flux quantum cross-bar switch and demultiplexer, IEEE Transactions on Applied Superconductivity 5 2996–2999.

    Article  Google Scholar 

  8. Worsham, A.H., Miklich, A.H., Miller, D.L., Kang, J.H., and Przybysz, J.X. (1996) Single flux quantum circuits for 2.5Gbps data switching, to be published in IEEE Transactions on Applied Superconductivity, June 1997.

    Google Scholar 

  9. Kang, J.H., Worsham, A.H., and Przybysz, J.X. (1995) 4.6 GHz SFQ shift register and SFQ pseudorandom bit sequence generator, IEEE Transactions on Applied Superconductivity 5 2827–2830.

    Article  Google Scholar 

  10. Kang, J.H., Przybysz, J.X., Martinet, S.S., Worsham, A.H., Miller, D.L., and McCambridge, J.D. (1996) 3.69 GHz single flux quantum pseudorandom bit sequence generator fabricated with Nb/A1Ox/Nb, to be published in IEEE Transactions on Applied Superconductivity, June 1996.

    Google Scholar 

  11. Kirichenko, A.F., and Mukhanov, O.A. (1996) Advanced on-chip test technology for RSFQ circuits, to be published in IEEE Transactions on Applied Superconductivity,June 1997.

    Google Scholar 

  12. Miller, D.L., Przybysz, J.Z., and Kang, J.-H. (1993) Margins and Yields of SFQ Circuits in HTS Materials, IEEE Transactions on Applied Superconductivity 3 2728–2731

    Article  ADS  Google Scholar 

  13. Phillips, J. (19930 Materials issues affecting the new superconducting electronics, in H. Weinstock and R.W. Ralston (eds.), The New Superconducting Electronics, Kluwer Academic Publishers, Dordrecht, pp. 59–88.

    Google Scholar 

  14. Somekh, R.E., and Barber, Z.H. (1992) The deposition of ceramic superconductors, in R. Kossowsky, B. Raveau, D. Wohlleben, and S.K. Patapics (eds.), Physics and Materials Science of High Temperature Superconductors, II, Kluwer Academic Publishers, Dordrecht, pp. 443–469.

    Chapter  Google Scholar 

  15. Chrissey, D.B., and Hubler, G.K., editors (1994) Pulsed Laser Deposition of Thin films, John Wiley and Sons, New York.

    Google Scholar 

  16. Private communication, Werner Prussheit.

    Google Scholar 

  17. Gavaler, J.R., Talvacchio, J., Braggins, T.T., Forrester, M.G., and Greggi, J. (1991) Critical parameters in the single-target sputtering of YBa2Cu3O7, J. Appl. Phys. 70 4383–4391.

    Article  ADS  Google Scholar 

  18. Greer, J.A., (1994) Commercial scale-up of pulsed laser deposition, in Chrissey, D.B., and Hubler, G.K., editors (1994) Pulsed Laser Deposition of Thin films, John Wiley and Sons, New York.

    Google Scholar 

  19. Holzapfel, G., Roas, B., Schultz, L., Bauer, P., and SaemannIschenko, G. (1992) Appl. Phys. Lett. 59 3178.

    Article  ADS  Google Scholar 

  20. Laibowitz, R.B., Koch. R.H., Chaudhari, P., and Gambino, R.J. (1987) Thin superconducting oxide films, Phys. Rev. B 35 8821–8823.

    Article  ADS  Google Scholar 

  21. Berberich, P., Utz, B., Prusseit, W., and Kinder, H. (1994) Homogeneous high quality YBa2Cu3O7 films on 3“ and 4” substrates, Physica C 219 497–504.

    Article  ADS  Google Scholar 

  22. Prusseit, W., Utz, B., Berberich, P., and Kinder, H. (1994), Journ. of Supercond. 7, 231.

    Article  ADS  Google Scholar 

  23. Talvacchio, J., Forrester, M.G., and Gavaler, J.R., (1995) Properties of Passive Structures for Multilayer HTS Digital Circuits, IEEE Transactions on Applied Superconductivity 5, 3139–3142.

    Article  Google Scholar 

  24. Ockenfuss, G., Wördenweber, R., Scherer, T.A., Unger, R., and Jutzi, W. (1995) In situ low pressure oxygen annealing of YBa2Cu3O7- δ single and multilayer systems, Physica C 243 24–28.

    Article  ADS  Google Scholar 

  25. Phillips, J.M. (1996) Substrate selection for high-temperature superconducting thin films, J. Appl. Phys. 79 1829–1848.

    Article  ADS  Google Scholar 

  26. Dimos, D. Chaudhari, P., Mannhart, J., and Legoues, F.K. (1988) Orientation dependence of grain-boundary critical currents in YBCO bicrystals, Phys. Rev. Lett. 61 219–2222.

    Article  ADS  Google Scholar 

  27. Dimos, D., Chaudhari, P., and Mannhart, J. (1990) Superconducting transport properties of grain boundaries in YBCO bicrystals, Phys. Rev. B 41 4038–4049.

    Article  ADS  Google Scholar 

  28. Gross, R., Chaudhari, P. Kawasaki, M., and Gupta, A. (1991) Superconducting transport characteristics of YBCO grain boundary junctions, IEEE Trans. Mag. 27, 3227–3230.

    Article  ADS  Google Scholar 

  29. Char, K., Colclough, M.S., Garrison, S.M., Newman, N., and Zaharchuk, G. (1991) Biepitaxial grain-boundary junctions in YBCO, Appl, Phys. Lett. 59 733–735.

    Google Scholar 

  30. Wu, X.D., Luo, L., Muenchausen, R.E., Springer, K.N., and Foltyn, S. (1992) Creation of 45º grain-boundary junctions by lattice engineering, Appl. Phys. Lett. 60 1381–1383.

    Article  ADS  Google Scholar 

  31. Simon, R.W., Burch, J.F., Daly, K.P., Dozier, W.D., Hu, R., Lee, A.E., Luine, J.A., Manasevit, H.M., Platt, C.E., Schwarzbeck, S.M., St. John, D., Wire, M.S., and Zani, M.J. (1990) Progress towards a YBCO circuit process, in R.D. McConnnell and R. Noufi (eds.) Science and Technology of Thin Film Superconductors 2, Plenum Press, New York, pp. 549–558.

    Chapter  Google Scholar 

  32. Jia, C.L., Kabius, B., Urban, K., Herrmann, K., Cui, G.J. Schubert, J., Zander, W., Braginski, A.I., and Heiden, C. (1991) Microstructure of epitaxial YBCO films on step-edge SrTiO3 substrates Physica C 175 545–554.

    Article  ADS  Google Scholar 

  33. Jia, C.L., Kabius, B., Urban, K., Herrmann, K., Schubert, J., Zander, W., and Braginski, A.I., (1992) The microstructure of epitaxial YBCO films on steep steps in LaA1O3 substrates, Physica C 196, 211–226.

    Article  ADS  Google Scholar 

  34. Herrmann, K., Zhang, Y., Mück, H.M., Schubert, J., Zander, W., and Braginski, A.I. (1991) Characterization of YBa2Cu3O7 Step-Edge Junctions, Supercond. Sci. & Techn. 4 583–586.

    Article  ADS  Google Scholar 

  35. Herrmann, K., Kunkel, G., Siegel, M., Schubert, J., Zander, W., Braginski, A.I., Jia, C.L., Kabius, B., and Urban, K. (1995) Correlation of YBCO step-edge junction characteristics with microstructure, J. Appl. Phys. 78 1131–1139.

    Article  ADS  Google Scholar 

  36. Luine, J., Bulman, J., Burch, J., Daly, K., Pettiette-Hall, C., and Schwarzbek, S. (1992) Characteristics of high performance YBCO step-edge junctions, Appl. Phys. Lett. 61 1128–1130.

    Article  ADS  Google Scholar 

  37. Sun, J.Z., Gallagher, W.J., Callegari, A.C., Foglietti, V., and Koch, R.H. (1993) Improved process for high-Tc superconducting step-edge junctions, Appl. Phys. Lett. 63, 1561–1563.

    Article  ADS  Google Scholar 

  38. Forrester, M.G., Davidson, A., Talvacchio, J., Gavaler, J.R., and Przybysz, J.Z., (1994) Inductance measurements in multilevel high Tc step-edge grain boundary SQUIDs, Appl. Phys. Lett. 65 1835–1837.

    Article  ADS  Google Scholar 

  39. Gao, J., Aarnink, W.A.M., Gerritsma, G.J., and Rogalla, H. (1990) Controlled preparation of all high-Tc, SNS-type edge junctions and dc SQUIDs, Physica C 171, 126–130.

    Article  ADS  Google Scholar 

  40. Gao, J., Boguslayskii, Y., Klopman, B.B., Terpstra, D., Wijbrans, R., Gerritsma, G.J., and Rogalla, H. (1992) YBCO/PRBCO/YBCO Josephson ramp junctions, J. Appl. Phys. 72, 575–583.

    Article  ADS  Google Scholar 

  41. Barrier, J.B., Hunt, B.D., Foote, M.C., Pike, W.T., and Vasquez, R.P. (1993) YBa2Cu3O7-δ -based, edge-geometry SNS Josephson junctions with low-resistivity PrBa2Cu3O7-δ barriers, Physica C 207 381–390.

    Article  ADS  Google Scholar 

  42. Verhoeven, M.A.J., Gerritsma, G.J. and Rogalla, H., Ramp type HTS junctions with PrBaCuBaO barriers, IEEE Transactions on Applied Superconductivity 5, 2095–2098.

    Google Scholar 

  43. Hunt, G.D., Foote, M.C., and Bajuk, L.J. (1991) A11-high-Tc, edge-geometry weak links utilizing YBCO barrier layers, Appl. Phys. Lett. 59 982–984.

    Article  ADS  Google Scholar 

  44. Char, K., Colclough, M.S., Geballe, T.H., and Myers, K.E. (1993) High Tc, superconductor-normal-superconductor Josephson junctions using CaRuO3 as the metallic barrier, Appl. Phys, Lett. 62 196–198.

    Google Scholar 

  45. Antognazza, L., Char, K., Geballe, T.H., King, L.L.H., and Sleight, A.W. (1993) Josephson coupling of YBCO through a ferromagnetic barrier SrRuO3, Appl. Phys., Lett. 63, 1005–1007.

    Google Scholar 

  46. Dömel, R., Horstmann, C., Siegel, M., and Braginski, A.I. (1995) Resonant tunneling transport across YBCO-SrRuO3 interfaces, Appl. Phys. Lett. 67, 1775–1777.

    Article  ADS  Google Scholar 

  47. Antognazza, L., Moeckly, B.H., Geballe, T.H., and Char, K. (1995) Properties of high Tc Josephson junctions with Y0.7Ca0.3Ba2Cu3O7-δ barrier layers, Phys. Rev. B 52, 4559–4567.

    Article  ADS  Google Scholar 

  48. Polturak, E., Koren, G., Cohen, D., Aharoni, E., and Deutscher, G. (1991) The proximity effect in YBCO/Y0.6Pr0.4Ba2Cu3O7/YBCO SNS junctions, Phys. Rev. Lett. 67, 3038–3041.

    Article  ADS  Google Scholar 

  49. Stölzel, C., Siegel, M., Adrian, G., Krimmer, C., Söllner, J., Wilkens, W., Schulz, G., and Adrian, H. (1993) Transport properties of YBCO/Y0.3Pr0.7Ba2Cu3O7-δ/YBCO Josephson junctions, Appl. Phys. Lett. 63, 2970–2972.

    Article  ADS  Google Scholar 

  50. Char, K., Antognazza, L. and Geballe, T.H. (1994) Properties of YBCO/ YBa2Cu2.79Co0.21O7-x/YBCO edge junctions, Appl. Phys. Lett. 65, 904–906.

    Article  ADS  Google Scholar 

  51. Hunt, B.D., Foote, M.C., Pike, W.T., Barner, J.B., and Vasquez, R.P. (1994) High-Tc edge-geometry SNS weak links on silicon-on-sapphire substrates, Physica C 230, 141–152.

    Article  ADS  Google Scholar 

  52. Faley, M.I., Poppe, U., Jia, C.L., and Urban, K. (1995) Proximity-effect in edge-type junctions with PBCO barriers prepared by Br-ethanol etching, IEEE Transactions on Applied Superconductivity 5, 2091–2094.

    Article  Google Scholar 

  53. Jia, C.L., Faley, M.I., Poppe, U., and Urban, K. (1995) The effect of chemical and ion-beam etching on the atomic structure of interfaces in YBCO/PBCO Josephson junctions, Appl. Phys. Lett. 67, 3635–3637.

    Article  ADS  Google Scholar 

  54. Strikovsky, M.D., and Engelhardt, A. (1996) Ramp-typeYBa2Cu3O7-δ Josephson junctions with high characteristic voltage, fabricated by a new, completely in situ growth technique, Appl. Phys. Lett. 69, 2918–2920.

    Article  ADS  Google Scholar 

  55. Sato, H., Akoh, H., and Takada, S. (1994) Anisotropic Josephson effect in all (103)-oriented YBa2Cu3O7-δ /PrBa2Cu3O7-δ./YBa2Cu3O7-δ junctions.

    Google Scholar 

  56. Vasquez, R.P., Hunt, B.D., and Foote, M.C. (1988) Nonaqueous chemical etch for YBa2Cu3O7- x, Appl. Phys. Lett. 53, 2692–2694.

    Article  ADS  Google Scholar 

  57. Strikovsky, M.D., Kahlmann, F., Schubert, J., Zander, W., Glyantsev, V., Ockenfuss, G., and Jia, C.L. (1995) Fabrication of YBCO thin-film flux transformers using a novel microshadow mask technique for in situ patterning, Appl. Phys. Lett. 66 3521–3523.

    Article  ADS  Google Scholar 

  58. Talvacchio, J., Forrester, M.G., Hunt, B.D., McCambridge, J.D., and Young, R.M. (1996) Materials basis for a six-level epitaxial HTS digital circuit process, to be published in IEEE Transactions on Applied Superconductivity,June 1997.

    Google Scholar 

  59. Li, H.Q., Ono, R.H., Vale, L.R., Rudman, D.A., and Liou, S.H. (1996) A novel multilayer circuit process using YBa2Cu3OX/SrTiO3 thin films patterned by wet etching and ion milling, Appl. Phys. Lett. 69 2752–27554.

    Article  ADS  Google Scholar 

  60. Marathe, A.P., Ludwig, F., and Van Duzer, T. (1995) Process issues and components for HTS digital integrated circuit fabrication, IEEE Transactions on Applied Superconductivity 5 3135–3138.

    Article  Google Scholar 

  61. Hunt, B.D., Forrester, M.G., Talvacchio, J., McCambridge, J.D., and Young, R.M. (1996) High-Tc superconductor/normalmetal/superconductor edge junctions and SQUIDs with integrated groundplanes, Appl. Phys. Lett. 68 3805–3807.

    Article  ADS  Google Scholar 

  62. Forrester, M.G., Hunt, B.D., Talvacchio, J., Young, R.M., and McCambridge, J.D. (1996) Multilayer edge SNS SQUIDs for digital circuits, to be published in IEEE Transactions on Applied Superconductivity,June 1997.

    Google Scholar 

  63. McCambridge, J.D., Forrester, M.G., Miller, D.L., Hunt, B.D., Przybysz, J.X., Talvacchio, J., and Young, R.M. (1996) Multilayer HTS SFQ analog-to-digital converters, to be published in IEEE Transactions on Applied Superconductivity, June 1997.

    Google Scholar 

  64. Mallison, W.H., Berkowitz, S.J., Hirahara, A.S., Neal, M.J., and Char, K. (1996) A multilayer YBa2Cu3OX Josephson junction process for digital circuit applications, Appl. Phys. Lett. 68 1835–1837.

    Article  Google Scholar 

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Forrester, M.G. et al. (1997). HTS Multilayer Process Development for Digital Circuits. In: Kossowsky, R., Jelinek, M., Novak, J. (eds) Physics and Materials Science of High Temperature Superconductors, IV. NATO ASI Series, vol 26. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5732-2_20

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  • DOI: https://doi.org/10.1007/978-94-011-5732-2_20

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