Abstract
The nondestructive method is proposed for determination of the thermal conductivity of transparent, thermally thin coating on opaque, thermally thick substrates. The sample is heated by intensity modulated, unfocused laser beam. The photodeflection detection is used for signal registration and the “mirage” signal dependence on modulation frequency is measured.. The method is based on 1-D model of heat propagation in layered structure. The light interference in coating layer is taken into account. Two geometries of photothermal experiments are considered. The modulated light may illuminate the coated surface of sample or the opposite one. It is shown that the ratio of signals measured in these geometries does not depend on parameters of the probe beam. The proposed method is verified experimentally for silicon wafers coated with DLC. Obtained results are very promising.
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References
Graebner, J.E., Mucha, J.A., Seibles, L., and Kamlot, G.W. (1992) The thermal conductivity of chemical-vapor-deposited diamond films on silicon, J. Appl. Phys. 71(7), 3143–3146.
Tokmakoff, A., Banholzer, W.F., and Fayer, M.D. (1993) Thermal diffusivity measurements of natural and isotopically enriched diamond by picosecond infrared transient grating experiments, Appl. Phys. A56, 87–90.
Visser, E.P., Versteegen, E.H., and van Enckevort, W.J.P. (1992) Measurement of thermal diffusion in thin films using a modulated laser technique: Application to chemical-vapor-deposited diamond films, J. Appl. Phys. 71(7), 3238–3248.
Chen, Z., and Mandelis, A. (1992) Thermal-diffusivity measurements of ultrahigh thermal conductors with use of scanning photothermal rate-window spectrometry: Chemical-vapor-deposition diamonds, Phys. Rev. B46(20), 13526-.
Petrovsky, A.N., Salnick, A.O., Mukhin, D.O., and Spitsyn, B.V. (1992) Thermal conductivity measurements of synthetic diamond films using the photothermal beam deflection technique, Mater. Sci. Eng. B11, 353–354.
Boudina, A., Fitzer, E., Netzelmann, U., and Reiss, H. (1993) Thermal diffusivity of diamond films synthesized from methane by arc discharge plasma jet CVD, Diamond Relat. Mater. 2, 852–858.
Bachmann, P.K., Hagemann, H.J., Lade, H., Leers, D., Wiechert, D.U., Wilson, H., Fournier, D., and Plamann, K. (1995) Thermal properties of C/H-, C/H/O-, C/H/Nand C/H/X-grown polycrystaline CVD diamond, Diamond Relat. Mater. 4, 820–826.
Murphy, J.C., and Aamodt, L.C. (1980) Photothermal spectroscopy using optical probing: Mirage effect, J. Appl. Phys. 51(9), 4580–4588.
Bodzenta, J., Mazur, J., Bukowski, R. and Kleszczewski, Z. (1995) Photothermal measurement for plates, Proc. SPIE 2643, 286–292.
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© 1997 Springer Science+Business Media Dordrecht
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Mazur, J., Bodzenta, J., Kleszczewski, Z. (1997). Photothermal Determination of the Thermal Conductivity of Superhard Thin Films. In: Prelas, M.A., Benedictus, A., Lin, LT.S., Popovici, G., Gielisse, P. (eds) Diamond Based Composites. NATO ASI Series, vol 38. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5592-2_21
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DOI: https://doi.org/10.1007/978-94-011-5592-2_21
Publisher Name: Springer, Dordrecht
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